Minato-ku
Japan
8
2007-10-04
2
2009-04-21
These are the the leading inventors for applications assigned to e-Beam Corporation:
e-Beam Corporation based in Minato-ku, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#2 | 2007-10-04 ✅ Patent 7,550,739 granted on 2009-06-23Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#3 | 2007-06-07SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
#4 | 2007-05-17SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
#5 | 2007-05-17SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
#6 | 2007-05-03SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#7 | 2007-04-26SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#8 | 2007-04-26SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
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