Chungcheongnam-do
South Korea
4
2007-09-20
2
2008-05-27
These are the the leading inventors for applications assigned to PKL CO., LTD.:
PKL CO., LTD. based in Chungcheongnam-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
DEVICE FOR CLEANING A PHOTOMASK
#2 | 2007-09-20 ✅ Patent 7,377,984 granted on 2008-05-27Method for cleaning a photomask
#3 | 2006-11-16PHASE SHIFT MASK FOR PREVENTING HAZE
#4 | 2006-09-21 ✅ Patent 7,186,301 granted on 2007-03-06Device and method for cleaning photomask
284600 ⎘