Veldhovne
Netherlands
2
2007-10-04
2
2008-06-24
These are the the leading inventors for applications assigned to ASML Netherlands B.V.:
ASML Netherlands B.V. based in Veldhovne, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Lithographic apparatus and device manufacturing method using overlay measurement quality indication
#2 | 2007-09-27 ✅ Patent 7,486,408 granted on 2009-02-03Lithographic apparatus and device manufacturing method with reduced scribe lane usage for substrate measurement
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