Toyko
Japan
3
2009-03-12
3
2011-10-18
These are the the leading inventors for applications assigned to Sumco Corporation:
Sumco Corporation based in Toyko, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Quantitative evaluation device and method of atomic vacancy existing in silicon wafer
#2 | 2007-05-24 ✅ Patent 7,943,497 granted on 2011-05-17Method for manufacturing an SOI substrate
#3 | 2006-07-06 ✅ Patent 7,199,057 granted on 2007-04-03Method of eliminating boron contamination in annealed wafer
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