San Jose, California
United States
6
2008-01-24
6
2009-02-03
These are the the leading inventors for applications assigned to KLA-TENCOR:
KLA-TENCOR based in San Jose, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Multiple beam inspection apparatus and method
#2 | 2007-05-17 ✅ Patent 7,655,482 granted on 2010-02-02Chemical mechanical polishing test structures and methods for inspecting the same
#3 | 2007-02-20 ✅ Patent 7,179,661 granted on 2007-02-20Chemical mechanical polishing test structures and methods for inspecting the same
#4 | 2006-11-30 ✅ Patent 7,724,939 granted on 2010-05-25Method and apparatus for inspecting reticles implementing parallel processing
#5 | 2006-09-12 ✅ Patent 7,106,895 granted on 2006-09-12Method and apparatus for inspecting reticles implementing parallel processing
#6 | 2005-08-11 ✅ Patent 7,102,749 granted on 2006-09-05Overlay alignment mark design
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