Chigasaki
Japan
52
2024-02-01
52
2024-04-30
These are the the leading inventors for applications assigned to ULVAC, INC:
ULVAC, INC based in Chigasaki, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Deposition method and deposition apparatus
#2 | 2023-01-19 ✅ Patent 11,732,965 granted on 2023-08-22Freeze-drying device and freeze-drying method
#3 | 2022-12-08 ✅ Patent 12,205,795 granted on 2025-01-21Plasma processing device
#4 | 2022-09-29 ✅ Patent 12,012,650 granted on 2024-06-18Sputtering target and method of producing sputtering target
#5 | 2022-09-08 ✅ Patent 12,288,709 granted on 2025-04-29Vacuum processing apparatus and vacuum processing method using the same
#6 | 2022-08-18 ✅ Patent 11,480,390 granted on 2022-10-25Freeze-drying device and freeze-drying method
#7 | 2022-05-03 ✅ Patent 11,320,200 granted on 2022-05-03Freeze-drying device and freeze-drying method
#8 | 2022-01-20 ✅ Patent 11,869,791 granted on 2024-01-09Vacuum processing apparatus
#9 | 2021-09-23 ✅ Patent 12,014,946 granted on 2024-06-18Electrostatic chuck, vacuum processing apparatus, and substrate processing method
#10 | 2021-09-23 ✅ Patent 11,842,887 granted on 2023-12-12Film formation apparatus
#11 | 2021-09-16 ✅ Patent 11,473,188 granted on 2022-10-18Sputtering apparatus
#12 | 2021-09-09 ✅ Patent 11,505,861 granted on 2022-11-22Substrate guide and carrier
#13 | 2021-09-02 ✅ Patent 11,646,199 granted on 2023-05-09Sub-stoichiometric metal-oxide thin films
#14 | 2021-08-19 ✅ Patent 11,335,782 granted on 2022-05-17Oxide semiconductor thin film, thin film transistor, method producing the same, and sputtering target
#15 | 2021-08-05 ✅ Patent 11,462,873 granted on 2022-10-04Contact-type power supply apparatus and contact unit
#16 | 2021-07-22 ✅ Patent 11,935,936 granted on 2024-03-19Aluminum alloy film, method of producing the same, and thin film transistor
#17 | 2021-06-10 ✅ Patent 11,421,315 granted on 2022-08-23Sputtering target and method of producing sputtering target
#18 | 2021-04-15 ✅ Patent 11,559,889 granted on 2023-01-24Substrate transport device and substrate transporting method
#19 | 2021-04-08 ✅ Patent 11,628,565 granted on 2023-04-18Substrate transport device and substrate transporting method
#20 | 2021-03-25 ✅ Patent 11,629,400 granted on 2023-04-18Sputtering target and method of producing the same
#21 | 2021-03-18 ✅ Patent 11,112,176 granted on 2021-09-07Freeze vacuum drying apparatus and freeze vacuum drying method
#22 | 2021-02-11 ✅ Patent 11,092,246 granted on 2021-08-17Gate valve
#23 | 2020-12-03 ✅ Patent 11,189,784 granted on 2021-11-30Method for forming magnetic film and method for manufacturing magnetic storage element
#24 | 2020-12-03 ✅ Patent 10,934,616 granted on 2021-03-02Cathode device and sputtering apparatus
#25 | 2020-10-01 ✅ Patent 11,510,320 granted on 2022-11-22Method of processing wiring substrate
#26 | 2020-07-30 ✅ Patent 10,837,447 granted on 2020-11-17Vacuum pump having a first housing with a supply port and a second housing with a recess portion
#27 | 2020-06-04 ✅ Patent 10,895,258 granted on 2021-01-19Vacuum pump
#28 | 2020-05-28 ✅ Patent 11,674,217 granted on 2023-06-13Method of manufacturing substrate with a transparent conductive film, manufacturing apparatus of substrate with transparent conductive film, substrate with transparent conductive film, and solar cell
#29 | 2020-04-23 ✅ Patent 11,411,120 granted on 2022-08-09Method for manufacturing semiconductor device using plasma CVD process
#30 | 2020-04-09 ✅ Patent 10,982,663 granted on 2021-04-20Vacuum pump
#31 | 2019-11-21 ✅ Patent 11,189,482 granted on 2021-11-30Thin film formation method
#32 | 2019-09-19 ✅ Patent 11,319,630 granted on 2022-05-03Deposition apparatus and deposition method
#33 | 2019-08-01 ✅ Patent 10,529,532 granted on 2020-01-07Ion source and ion implantation apparatus
#34 | 2019-08-01 ✅ Patent 10,612,130 granted on 2020-04-07Vacuum processing apparatus
#35 | 2019-04-25 ✅ Patent 10,461,731 granted on 2019-10-29Power supply device
#36 | 2019-03-07 ✅ Patent 10,975,465 granted on 2021-04-13Method of forming internal stress control film
#37 | 2018-12-27 ✅ Patent 10,994,938 granted on 2021-05-04Vacuum processing device
#38 | 2018-12-13 ✅ Patent 11,111,577 granted on 2021-09-07Film-forming apparatus and film-forming method
#39 | 2013-06-13 ✅ Patent 8,945,296 granted on 2015-02-03Water-reactive Al-based composite material, water-reactive Al-based thermally sprayed film, process for production of such Al-based thermally sprayed film, and constituent member for film-forming chamber
#40 | 2013-02-21 ✅ Patent 9,146,187 granted on 2015-09-29Viscoelasticity measuring method and viscoelasticity measuring apparatus
#41 | 2011-05-05 ✅ Patent 8,476,161 granted on 2013-07-02Method for forming Cu electrical interconnection film
#42 | 2010-08-12 ✅ Patent 8,153,926 granted on 2012-04-10Etching method and system
#43 | 2010-07-27 ✅ Patent 7,763,545 granted on 2010-07-27Semiconductor device manufacturing method
#44 | 2009-03-19 ✅ Patent 7,847,271 granted on 2010-12-07Ion implanting apparatus
#45 | 2007-07-19 ✅ Patent 7,692,120 granted on 2010-04-06Transport robot and transport apparatus
#46 | 2006-11-21 ✅ Patent 7,138,364 granted on 2006-11-21Cleaning gas and etching gas
#47 | 2006-09-26 ✅ Patent 7,111,500 granted on 2006-09-26Analysis method using piezoelectric resonator
#48 | 2005-08-30 ✅ Patent 6,935,351 granted on 2005-08-30Method of cleaning CVD device and cleaning device therefor
#49 | 2005-07-19 ✅ Patent 6,919,106 granted on 2005-07-19Method for preparing porous SOG film
#50 | 2005-04-26 ✅ Patent 6,885,154 granted on 2005-04-26Discharge plasma processing system
#51 | 2005-03-31 ✅ Patent 7,331,232 granted on 2008-02-19Measurement method and biosensor apparatus using resonator
#52 | 2005-01-11 ✅ Patent 6,840,732 granted on 2005-01-11Transport apparatus and vacuum processing system using the same
Also check out ULVAC, INC.'s (Chigasaki, Japan) applicant profile with 42 patent applications submitted.
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