Tokyo
Japan
2
2005-07-07
2
2008-04-29
These are the the leading inventors for applications assigned to Tokyo Electron Co., Ltd.:
Tokyo Electron Co., Ltd. based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Internal member for plasma-treating vessel and method of producing the same
#2 | 2005-04-26 ✅ Patent 6,884,516 granted on 2005-04-26Internal member for plasma-treating vessel and method of producing the same
301970 ⎘