Suwon-si
South Korea
17
2026-03-26
6
2025-09-23
These are the the leading inventors for applications assigned to EGTM Co., Ltd.:
EGTM Co., Ltd. based in Suwon-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
METHOD OF DEPOSITING THIN FILM AND METHOD OF MANUFACTURING MEMORY DEVICE INCLUDING THE SAME
#2 | 2026-03-05METHOD OF TREATING THIN FILMS AND METHOD OF MANUFACTURING MEMORY DEVICE
#3 | 2026-03-05ALUMINUM PRECURSOR, METHOD OF FORMING A THIN LAYER USING THE SAME, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING MEMORY DEVICE
#4 | 2025-09-11METHOD OF TREATING THIN FILMS AND METHOD OF MANUFACTURING MEMORY DEVICE
#5 | 2025-08-14METHOD OF TREATING THIN FILMS AND METHOD OF MANUFACTURING MEMORY DEVICE
#6 | 2025-07-31METHOD OF TREATING THIN FILMS AND METHOD OF MANUFACTURING MEMORY DEVICE
#7 | 2025-06-19PRECURSOR FOR FORMING SILICON-CONTAINING THIN FILM WITH HIGH HARDNESS AND LOW DIELECTRIC CONSTANT AND MANUFACTURING METHOD FOR SILICON-CONTAINING THIN FILM USING THEREOF
#8 | 2024-11-07 ✅ Patent 12,421,605 granted on 2025-09-23METHOD FOR AREAL SELECTIVE FORMING OF THIN FILM
#9 | 2024-06-13METHOD OF FORMING THIN FILM USING MATERIAL OF CHEMICAL PURGE
#10 | 2024-02-29 ✅ Patent 12,252,781 granted on 2025-03-18Area-selective method for forming thin film by using nuclear growth retardation
#11 | 2023-09-28METHOD OF DEPOSITING THIN FILM AND METHOD OF MANUFACTURING MEMORY DEVICE INCLUDING THE SAME
#12 | 2023-09-14ALUMINUM PRECURSOR, METHOD OF FORMING A THIN LAYER USING THE SAME, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING MEMORY DEVICE
#13 | 2022-12-22 ✅ Patent 12,247,289 granted on 2025-03-11Method for forming thin film using surface protection material
#14 | 2022-12-22 ✅ Patent 11,958,874 granted on 2024-04-16Organo tin compound for thin film deposition and method for forming tin-containing thin film using same
#15 | 2022-04-14METHOD OF DEPOSITING THIN FILMS USING PROTECTIVE MATERIAL
#16 | 2021-12-30 ✅ Patent 11,634,441 granted on 2023-04-25Group 5 metal compound for thin film deposition and method of forming group 5 metal-containing thin film using same
#17 | 2021-05-06 ✅ Patent 11,591,691 granted on 2023-02-28Method of forming a thin film using a surface protection material
Also check out EGTM CO., LTD.'s (Suwon-si, South Korea) applicant profile with 16 patent applications submitted.
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