Innovative Micro Technology

MEMS dual substrate switch with magnetic actuation

#2 | 2021-03-18 ✅ Patent 11,309,837 granted on 2022-04-19

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Resonant filter using mm wave cavity

#3 | 2021-01-21

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MEMS MAGNETIC SWITCH WITH PERMEABLE FEATURES

#4 | 2021-01-21 ✅ Patent 11,305,982 granted on 2022-04-19

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Eight spring dual substrate MEMS plate switch and method of manufacture

#5 | 2020-12-10 ✅ Patent 11,258,425 granted on 2022-02-22

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Microfabricated notch filter

#6 | 2020-12-10 ✅ Patent 11,502,669 granted on 2022-11-15

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Subterahertz microfabricated spectrometer

#7 | 2019-12-19

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LOW COST WAFER BONDING METHOD

#8 | 2019-11-07

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CONTACT SURFACE FOR MEMS DEVICE

#9 | 2019-10-31

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SHIELDED DUAL SUBSTRATE MEMS PLATE SWITCH AND METHOD OF MANUFACTURE

#10 | 2019-10-03

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METHOD FOR ETCHING SHAPES INTO SILICON

#11 | 2019-07-18

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MICROFABRICATED DEVICE WITH PIEZOELECTRIC SUBSTRATE AND METHOD OF MANUFACTURE

#12 | 2019-06-06 ✅ Patent 10,826,153 granted on 2020-11-03

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Resonant filter using mm wave cavity

#13 | 2019-05-09

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SCANNING OPTICAL BEAM SOURCE

#14 | 2019-02-28 ✅ Patent 10,804,850 granted on 2020-10-13

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Gas sensor using mm wave cavity

#15 | 2019-02-28

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MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION

#16 | 2019-02-28

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GAS SENSOR USING VCSEL

#17 | 2019-02-28 ✅ Patent 10,955,336 granted on 2021-03-23

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Gas sensor comprising a rotatable Fabry-Perot multilayer etalon

#18 | 2018-11-22 ✅ Patent 10,302,871 granted on 2019-05-28

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Microfabricated fiber optic platform

#19 | 2018-10-11 ✅ Patent 10,291,332 granted on 2019-05-14

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Self-aligned silicon fiber optic connector

#20 | 2018-06-28

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MICROFABRICATED OPTICAL APPARATUS WITH FLEXIBLE ELECTRICAL CONNECTOR

#21 | 2018-06-14 ✅ Patent 10,050,409 granted on 2018-08-14

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Microfabricated optical apparatus with grounded metal layer

#22 | 2018-06-07

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BONDLINE FOR MM-WAVE APPLICATIONS

#23 | 2018-05-24 ✅ Patent 10,388,468 granted on 2019-08-20

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Contact material for MEMS devices

#24 | 2018-05-03

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RF INTERCONNECT

#25 | 2018-04-24 ✅ Patent 9,950,923 granted on 2018-04-24

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Method for making vias using a doped substrate

#26 | 2018-03-22

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MEMS DEVICE WITH OFFSET ELECTRODE

#27 | 2018-03-15

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CONTACT SURFACE FOR MEMS DEVICE

#28 | 2017-11-23 ✅ Patent 10,011,478 granted on 2018-07-03

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Thermocompression bonding with raised feature

#29 | 2017-10-05 ✅ Patent 10,017,381 granted on 2018-07-10

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Microfabricated pressure transducer

#30 | 2017-08-17

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MICROFABRICATED OPTICAL APPARATUS

#31 | 2017-08-03

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THROUGH SUBSTRATE VIAS USING SOLDER BUMPS

#32 | 2017-05-25

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MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

#33 | 2017-05-04

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MICROFABRICATED OPTICAL APPARATUS

#34 | 2017-03-02

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DEVICE WITH SEPARATION LIMITING STANDOFF

#35 | 2016-11-15 ✅ Patent 9,493,877 granted on 2016-11-15

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Etching technique for microfabrication substrates

#36 | 2016-10-20 ✅ Patent 9,533,877 granted on 2017-01-03

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Anodic bonding of dielectric substrates

#37 | 2016-09-15 ✅ Patent 9,953,787 granted on 2018-04-24

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Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture

#38 | 2016-05-05 ✅ Patent 9,608,731 granted on 2017-03-28

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Microfabricated optical apparatus

#39 | 2016-04-05 ✅ Patent 9,302,905 granted on 2016-04-05

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Method for forming a microfabricated structure

#40 | 2016-03-31 ✅ Patent 9,324,613 granted on 2016-04-26

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Method for forming through substrate vias with tethers

#41 | 2016-02-11 ✅ Patent 9,330,874 granted on 2016-05-03

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Solder bump sealing method and device

#42 | 2015-10-13 ✅ Patent 9,156,679 granted on 2015-10-13

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Method and device using silicon substrate to glass substrate anodic bonding

#43 | 2015-09-24 ✅ Patent 9,162,878 granted on 2015-10-20

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Wafer level hermetic bond using metal alloy with raised feature and wetting layer

#44 | 2015-07-02 ✅ Patent 9,388,037 granted on 2016-07-12

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Device using glass substrate anodic bonding

#45 | 2015-07-02 ✅ Patent 9,315,375 granted on 2016-04-19

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Method using glass substrate anodic bonding

#46 | 2015-03-12

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Method for forming through wafer vias

#47 | 2015-01-29 ✅ Patent 9,372,185 granted on 2016-06-21

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MEMS particle sorting actuator and method of manufacture

#48 | 2015-01-29 ✅ Patent 9,274,180 granted on 2016-03-01

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Microfabricated magnetic field transducer with flux guide

#49 | 2014-09-30 ✅ Patent 8,847,373 granted on 2014-09-30

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Exothermic activation for high vacuum packaging

#50 | 2013-08-08

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Wafer bonding chamber with dissimilar wafer temperatures

#51 | 2012-12-25 ✅ Patent 8,338,283 granted on 2012-12-25

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Method and apparatus for applying thin liquid coatings

#52 | 2012-12-20 ✅ Patent 8,736,081 granted on 2014-05-27

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Wafer level hermetic bond using metal alloy with keeper layer

#53 | 2012-11-29 ✅ Patent 8,608,700 granted on 2013-12-17

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Mechanical engineering

Microfabicated electromagnetic actuator with push-pull motion

#54 | 2012-10-11 ✅ Patent 8,993,311 granted on 2015-03-31

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Multi-stage cartridge for MEMS particle storing system

#55 | 2012-07-26 ✅ Patent 8,822,207 granted on 2014-09-02

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Cartridge for MEMS particle sorting system

#56 | 2012-07-26 ✅ Patent 8,871,500 granted on 2014-10-28

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MEMS particle sorting actuator and method of manufacturing

#57 | 2012-06-28

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Removable/disposable apparatus for MEMS particle sorting device

#58 | 2012-05-31

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Deposition/bonding chamber for encapsulated microdevices and method of use

#59 | 2012-04-05 ✅ Patent 8,343,791 granted on 2013-01-01

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Plating process and apparatus for through wafer features

#60 | 2012-03-22 ✅ Patent 8,558,364 granted on 2013-10-15

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Inductive getter activation for high vacuum packaging

#61 | 2012-01-19 ✅ Patent 8,088,651 granted on 2012-01-03

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System and method for providing access to an encapsulated device

#62 | 2011-12-01 ✅ Patent 8,690,830 granted on 2014-04-08

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Mechanical engineering

In-plane electromagnetic MEMS pump

#63 | 2011-10-13 ✅ Patent 8,541,735 granted on 2013-09-24

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Inlaid optical material and method of manufacture

#64 | 2011-06-30 ✅ Patent 8,264,307 granted on 2012-09-11

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Dual substrate MEMS plate switch and method of manufacture

#65 | 2011-06-02 ✅ Patent 8,466,760 granted on 2013-06-18

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Configurable power supply using MEMS switch

#66 | 2011-02-03 ✅ Patent 8,288,211 granted on 2012-10-16

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Wafer level hermetic bond using metal alloy with keeper layer

#67 | 2010-01-28 ✅ Patent 8,245,391 granted on 2012-08-21

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Method of manufacturing a hysteretic MEMS two-dimensional thermal device

#68 | 2010-01-07 ✅ Patent 7,960,208 granted on 2011-06-14

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Wafer level hermetic bond using metal alloy with raised feature

#69 | 2009-08-13 ✅ Patent 7,944,113 granted on 2011-05-17

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Mechanical engineering

Hysteretic MEMS thermal device and method of manufacture

#70 | 2009-07-16 ✅ Patent 7,759,152 granted on 2010-07-20

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MEMS thermal actuator and method of manufacture

#71 | 2009-02-26 ✅ Patent 7,759,218 granted on 2010-07-20

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Indented lid for encapsulated devices and method of manufacture

#72 | 2009-01-22 ✅ Patent 7,713,786 granted on 2010-05-11

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Etching/bonding chamber for encapsulated devices and method of use

#73 | 2009-01-01

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Gettering material for encapsulated microdevices and method of manufacture

#74 | 2008-12-25

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Wafer level hermetic bond using metal alloy

#75 | 2008-11-13 ✅ Patent 7,893,798 granted on 2011-02-22

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Dual substrate MEMS plate switch and method of manufacture

#76 | 2008-11-13 ✅ Patent 7,968,986 granted on 2011-06-28

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Lid structure for microdevice and method of manufacture

#77 | 2008-11-13 ✅ Patent 7,864,006 granted on 2011-01-04

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MEMS plate switch and method of manufacture

#78 | 2008-10-16

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Micromechanical device with gold alloy contacts and method of manufacture

#79 | 2008-08-14 ✅ Patent 7,622,783 granted on 2009-11-24

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MEMS thermal actuator and method of manufacture

#80 | 2008-05-29 ✅ Patent 7,687,304 granted on 2010-03-30

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Current-driven device using NiMn alloy and method of manufacture

#81 | 2008-04-17 ✅ Patent 7,688,167 granted on 2010-03-30

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Contact electrode for microdevices and etch method of manufacture

#82 | 2008-04-03 ✅ Patent 7,675,162 granted on 2010-03-09

US20080079120A1

Interconnect structure using through wafer vias and method of fabrication

#83 | 2008-03-13 ✅ Patent 7,724,121 granted on 2010-05-25

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Singly attached MEMS thermal device and method of manufacture

#84 | 2008-01-10

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System and method for forming through wafer vias using reverse pulse plating

#85 | 2007-12-27 ✅ Patent 7,972,683 granted on 2011-07-05

US20070295456A1

Wafer bonding material with embedded conductive particles

#86 | 2007-11-22 ✅ Patent 7,550,778 granted on 2009-06-23

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System and method for providing access to an encapsulated device

#87 | 2007-11-15 ✅ Patent 7,462,931 granted on 2008-12-09

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Indented structure for encapsulated devices and method of manufacture

#88 | 2007-10-11 ✅ Patent 7,807,547 granted on 2010-10-05

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Wafer bonding material with embedded rigid particles

#89 | 2007-10-11 ✅ Patent 7,528,691 granted on 2009-05-05

US20070236313A1

Dual substrate electrostatic MEMS switch with hermetic seal and method of manufacture

#90 | 2007-09-27 ✅ Patent 7,812,703 granted on 2010-10-12

US20070222004A1

MEMS device using NiMn alloy and method of manufacture

#91 | 2007-09-20 ✅ Patent 7,872,432 granted on 2011-01-18

US20070215448A1

MEMS thermal device with slideably engaged tether and method of manufacture

#92 | 2007-08-23 ✅ Patent 7,785,913 granted on 2010-08-31

US20070196998A1

System and method for forming moveable features on a composite substrate

#93 | 2007-08-09 ✅ Patent 7,533,792 granted on 2009-05-19

US20070181633A1

Elastic interface for wafer bonding apparatus

#94 | 2007-07-26 ✅ Patent 7,548,145 granted on 2009-06-16

US20070170811A1

Hysteretic MEMS thermal device and method of manufacture

#95 | 2007-07-19 ✅ Patent 7,626,311 granted on 2009-12-01

US20070163255A1

Hysteretic MEMS two-dimensional thermal device and method of manufacture

#96 | 2007-05-03

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Compact MEMS thermal device and method of manufacture

#97 | 2007-03-15 ✅ Patent 7,276,991 granted on 2007-10-02

US20070057746A1

Multiple switch MEMS structure and method of manufacture

#98 | 2007-03-01 ✅ Patent 7,569,926 granted on 2009-08-04

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Wafer level hermetic bond using metal alloy with raised feature

#99 | 2007-03-01

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Wafer level hermetic bond using metal alloy

#100 | 2007-03-01 ✅ Patent 7,233,048 granted on 2007-06-19

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