SCREEN HOLDINGS CO., LTD.

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#2 | 2024-10-31 ✅ Patent 12,644,645 granted on 2026-06-02

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Mechanical engineering

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#3 | 2024-09-26 ✅ Patent 12,463,063 granted on 2025-11-04

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SUBSTRATE CLEANING DEVICE

#4 | 2024-09-12 ✅ Patent 12,629,716 granted on 2026-05-19

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#5 | 2024-08-29 ✅ Patent 12,557,578 granted on 2026-02-17

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SUBSTRATE PROCESSING METHOD AND SUBLIMATION DRYING PROCESSING AGENT

#6 | 2024-08-29 ✅ Patent 12,599,928 granted on 2026-04-14

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#7 | 2024-08-08 ✅ Patent 12,424,479 granted on 2025-09-23

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SUBSTRATE TREATING APPARATUS AND SUBSTRATE REVERSING METHOD

#8 | 2024-08-01 ✅ Patent 12,417,930 granted on 2025-09-16

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SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

#9 | 2024-08-01 ✅ Patent 12,508,623 granted on 2025-12-30

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SUBSTRATE PROCESSING METHOD

#10 | 2024-06-27 ✅ Patent 12,616,001 granted on 2026-04-28

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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

#11 | 2024-06-27 ✅ Patent 12,622,223 granted on 2026-05-05

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SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

#12 | 2024-06-13 ✅ Patent 12,456,634 granted on 2025-10-28

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SUBSTRATE PROCESSING APPARATUS

#13 | 2024-05-30 ✅ Patent 12,374,541 granted on 2025-07-29

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#14 | 2024-05-30 ✅ Patent 12,623,256 granted on 2026-05-12

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#15 | 2024-05-23 ✅ Patent 12,500,078 granted on 2025-12-16

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#16 | 2024-05-16 ✅ Patent 12,451,344 granted on 2025-10-21

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SUBSTRATE PROCESSING METHOD

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Substrate processing apparatus and substrate processing method

#18 | 2024-02-29 ✅ Patent 12,569,981 granted on 2026-03-10

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SUBSTRATE PROCESSING APPARATUS

#19 | 2024-02-01 ✅ Patent 12,397,323 granted on 2025-08-26

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SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

#20 | 2023-12-07 ✅ Patent 12,476,118 granted on 2025-11-18

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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

#21 | 2023-09-28 ✅ Patent 12,532,690 granted on 2026-01-20

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#22 | 2023-09-28 ✅ Patent 12,431,369 granted on 2025-09-30

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SUBSTRATE PROCESSING APPARATUS

#23 | 2023-09-28 ✅ Patent 12,496,622 granted on 2025-12-16

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SUBSTRATE PROCESSING APPARATUS

#24 | 2023-09-28 ✅ Patent 12,589,403 granted on 2026-03-31

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#25 | 2023-09-21 ✅ Patent 12,292,685 granted on 2025-05-06

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Substrate processing apparatus

#26 | 2023-09-21 ✅ Patent 12,521,753 granted on 2026-01-13

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SUBSTRATE PROCESSING APPARATUS

#27 | 2023-09-14 ✅ Patent 12,581,911 granted on 2026-03-17

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SUBSTRATE PROCESSING APPARATUS

#28 | 2023-09-14 ✅ Patent 12,255,061 granted on 2025-03-18

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Substrate processing method

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SUBSTRATE PROCESSING CONDITION SETTING METHOD, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING CONDITION SETTING SYSTEM, AND SUBSTRATE PROCESSING SYSTEM

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Substrate cleaning method and substrate processing method

#31 | 2023-08-24 ✅ Patent 12,423,801 granted on 2025-09-23

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SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING SYSTEM, AND SUBSTRATE TREATING METHOD

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Substrate processing method and substrate processing apparatus

#33 | 2023-07-27 ✅ Patent 12,638,317 granted on 2026-05-26

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SUBSTRATE PROCESSING APPARATUS, ABNORMALITY DETECTION METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM STORING ABNORMALITY DETECTION PROGRAM

#34 | 2023-05-04 ✅ Patent 11,967,518 granted on 2024-04-23

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Substrate treating apparatus and substrate reversing method

#35 | 2023-04-20 ✅ Patent 12,308,258 granted on 2025-05-20

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Substrate processing apparatus and substrate processing method

#36 | 2023-03-30 ✅ Patent 12,479,011 granted on 2025-11-25

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SUBSTRATE PROCESSING SYSTEM AND GROUP MANAGEMENT DEVICE

#37 | 2023-03-30 ✅ Patent 12,444,612 granted on 2025-10-14

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

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Substrate processing method and substrate processing apparatus

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SUBSTRATE PROCESSING APPARATUS

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Substrate treating apparatus

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Substrate processing apparatus and substrate processing method

#42 | 2023-03-02 ✅ Patent 12,628,602 granted on 2026-05-12

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

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SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING SYSTEM, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD AND SUBSTRATE PROCESSING METHOD

#44 | 2023-01-12 ✅ Patent 12,593,654 granted on 2026-03-31

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SUBSTRATE ALIGNMENT DEVICE, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE ALIGNMENT METHOD AND SUBSTRATE PROCESSING METHOD

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Substrate cleaning device and substrate cleaning method

#46 | 2022-12-29 ✅ Patent 12,017,257 granted on 2024-06-25

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Substrate cleaning device and substrate cleaning method

#47 | 2022-12-15 ✅ Patent 12,251,735 granted on 2025-03-18

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Substrate cleaning device and substrate cleaning method

#48 | 2022-11-24 ✅ Patent 12,417,906 granted on 2025-09-16

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#49 | 2022-11-17 ✅ Patent 12,400,868 granted on 2025-08-26

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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#50 | 2022-10-27 ✅ Patent 12,080,566 granted on 2024-09-03

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Substrate treating apparatus and substrate treating method

#51 | 2022-10-27 ✅ Patent 11,919,051 granted on 2024-03-05

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Substrate cleaning apparatus and substrate cleaning method

#52 | 2022-09-29 ✅ Patent 12,451,387 granted on 2025-10-21

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Substrate Processing Apparatus, Teaching Information Generation Method, Teaching Set, and Substrate Jig

#53 | 2022-09-29 ✅ Patent 12,575,363 granted on 2026-03-10

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Substrate Processing Apparatus, Analysis Method, Display Device, and Program

#54 | 2022-09-29 ✅ Patent 12,417,931 granted on 2025-09-16

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#55 | 2022-09-29 ✅ Patent 12,176,219 granted on 2024-12-24

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Semiconductor device forming method and substrate processing apparatus

#56 | 2022-09-22 ✅ Patent 11,996,302 granted on 2024-05-28

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Substrate processing apparatus and substrate processing method

#57 | 2022-09-01 ✅ Patent 12,327,737 granted on 2025-06-10

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SUBSTRATE TREATING APPARATUS

#58 | 2022-08-25 ✅ Patent 12,065,746 granted on 2024-08-20

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Chemistry; metallurgy

Substrate processing method and substrate processing apparatus

#59 | 2022-08-18 ✅ Patent 12,159,783 granted on 2024-12-03

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Method of restoring collapsed pattern, substrate processing method, and substrate processing device

#60 | 2022-08-18 ✅ Patent 12,145,171 granted on 2024-11-19

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Substrate treating apparatus

#61 | 2022-06-30 ✅ Patent 12,128,451 granted on 2024-10-29

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Substrate processing system and substrate processing method

#62 | 2022-06-02 ✅ Patent 12,278,135 granted on 2025-04-15

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Substrate treating apparatus

#63 | 2022-06-02 ✅ Patent 12,000,036 granted on 2024-06-04

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Chemistry; metallurgy

Substrate treating apparatus and substrate treating method

#64 | 2022-05-26 ✅ Patent 12,011,743 granted on 2024-06-18

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Lower-surface brush, brush base and substrate cleaning device

#65 | 2022-05-12 ✅ Patent 12,142,502 granted on 2024-11-12

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Processing condition selection method, substrate processing method, substrate product production method, processing condition selecting device, computer program, and storage medium

#66 | 2022-05-05 ✅ Patent 12,145,179 granted on 2024-11-19

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Substrate treating apparatus

#67 | 2022-05-05 ✅ Patent 12,599,925 granted on 2026-04-14

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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#68 | 2022-03-24 ✅ Patent 12,635,478 granted on 2026-05-19

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SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE CLEANING METHOD

#69 | 2022-03-24 ✅ Patent 12,036,662 granted on 2024-07-16

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Substrate processing apparatus and substrate processing method

#70 | 2022-03-17 ✅ Patent 12,411,414 granted on 2025-09-09

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PERIPHERAL PROCESSING METHOD

#71 | 2022-03-03 ✅ Patent 11,915,930 granted on 2024-02-27

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Substrate processing method and substrate processing apparatus

#72 | 2021-10-07 ✅ Patent 11,955,350 granted on 2024-04-09

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Substrate processing apparatus

#73 | 2021-09-16 ✅ Patent 11,908,938 granted on 2024-02-20

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Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus

#74 | 2021-08-26 ✅ Patent 12,512,342 granted on 2025-12-30

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SUBSTRATE TREATING APPARATUS

#75 | 2021-08-26 ✅ Patent 11,941,105 granted on 2024-03-26

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Maintenance device and maintenance method for substrate processing apparatus

#76 | 2021-07-29 ✅ Patent 12,119,242 granted on 2024-10-15

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Film processing method

#77 | 2021-07-22 ✅ Patent 11,935,763 granted on 2024-03-19

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Substrate processing device

#78 | 2021-07-08 ✅ Patent 11,915,945 granted on 2024-02-27

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Substrate processing apparatus

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Substrate treating apparatus and substrate transporting method

#80 | 2021-03-25 ✅ Patent 12,083,563 granted on 2024-09-10

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Substrate treating apparatus

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Substrate processing apparatus, film formation unit, substrate processing method and film formation method

#82 | 2021-02-11 ✅ Patent 11,900,509 granted on 2024-02-13

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Image processing method for a computer to assist a user in assessment of a cultured embryo

#83 | 2021-01-21 ✅ Patent 12,014,940 granted on 2024-06-18

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Substrate treating system and substrate transporting method

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Substrate processing apparatus and substrate processing method

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Liquid processing apparatus and liquid processing method

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Substrate processing method and substrate processing apparatus

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Substrate treating method and substrate treating apparatus

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Substrate treating apparatus

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Developing method

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Substrate processing device and substrate processing method

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Substrate processing method and substrate processing apparatus

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Substrate processing apparatus and substrate processing method using substrate processing apparatus

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Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method

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Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe

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Substrate treatment method and substrate treatment device

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Developing method

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Substrate treatment apparatus

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Substrate inverting device, substrate processing apparatus, and substrate supporting device, and substrate inverting method, substrate processing method, and substrate supporting method

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Substrate processing method and substrate processing apparatus

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