Oak Park, California
United States
6
2007-02-08
6
2008-12-16
These are the the leading inventors for applications assigned to Wireless MEMS, Inc.:
Wireless MEMS, Inc. based in Oak Park, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Balanced MEMS switch for next generation communication systems
#2 | 2006-06-15 ✅ Patent 7,545,234 granted on 2009-06-09Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
#3 | 2006-05-25 ✅ Patent 7,230,513 granted on 2007-06-12Planarized structure for a reliable metal-to-metal contact micro-relay MEMS switch
#4 | 2005-08-25 ✅ Patent 7,101,724 granted on 2006-09-05Method of fabricating semiconductor devices employing at least one modulation doped quantum well structure and one or more etch stop layers for accurate contact formation
#5 | 2005-08-25 ✅ Patent 7,352,266 granted on 2008-04-01Head electrode region for a reliable metal-to-metal contact micro-relay MEMS switch
#6 | 2005-08-04 ✅ Patent 6,962,832 granted on 2005-11-08Fabrication method for making a planar cantilever, low surface leakage, reproducible and reliable metal dimple contact micro-relay MEMS switch
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