CJ Delft
Netherlands
11
2010-09-02
11
2012-08-21
These are the the leading inventors for applications assigned to Mapper Lithography IP B.V.:
Mapper Lithography IP B.V. based in CJ Delft, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emission
#2 | 2010-07-08 ✅ Patent 8,242,467 granted on 2012-08-14Lithography system and projection method
#3 | 2009-03-12 ✅ Patent 7,868,307 granted on 2011-01-11Charged particle beam exposure system
#4 | 2008-03-27 ✅ Patent 7,348,567 granted on 2008-03-25Apparatus for generating a plurality of beamlets
#5 | 2007-08-16 ✅ Patent 8,242,470 granted on 2012-08-14Optical switching in a lithography system
#6 | 2007-03-22 ✅ Patent 7,709,815 granted on 2010-05-04Lithography system and projection method
#7 | 2007-03-15 ✅ Patent 7,868,300 granted on 2011-01-11Lithography system, sensor and measuring method
#8 | 2007-02-08 ✅ Patent 8,890,095 granted on 2014-11-18Reliability in a maskless lithography system
#9 | 2006-10-31 ✅ Patent 7,129,502 granted on 2006-10-31Apparatus for generating a plurality of beamlets
#10 | 2006-03-28 ✅ Patent 7,019,312 granted on 2006-03-28Adjustment in a MAPPER system
#11 | 2005-03-24 ✅ Patent 7,019,908 granted on 2006-03-28Modulator circuitry
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