Icheon-si
South Korea
5
2023-10-12
5
2023-12-12
These are the the leading inventors for applications assigned to ADAPTIVE PLASMA TECHNOLOGY CORP.:
ADAPTIVE PLASMA TECHNOLOGY CORP. based in Icheon-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Particle trapping apparatus for preventing an error of a pressure measurement
#2 | 2022-07-07 ✅ Patent 11,538,702 granted on 2022-12-27Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same
#3 | 2021-10-28 ✅ Patent 11,315,764 granted on 2022-04-26Structure variable type of a plasma source coil and a method for controlling the same
#4 | 2020-11-03 ✅ Patent 10,825,655 granted on 2020-11-03Separate plasma source coil and method of controlling the same
#5 | 2007-09-27 ✅ Patent 7,524,395 granted on 2009-04-28Plasma chamber having plasma source coil and method for etching the wafer using the same
Also check out Adaptive Plasma Technology Corp.'s (Icheon-si, South Korea) applicant profile with 6 patent applications submitted.
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