Yongin-si
South Korea
2
2020-04-16
2
2022-06-07
These are the the leading inventors for applications assigned to Jongpal Ahn:
Jongpal Ahn based in Yongin-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method of monitoring surface temperatures of wafers in real time in semiconductor wafer cleaning apparatus and temperature sensor for measuring surface temperatures of wafer
#2 | 2020-04-16 ✅ Patent 11,359,968 granted on 2022-06-14Apparatus and method for adjusting installation location of temperature sensor configured to measure surface temperature of wafer in semiconductor wafer cleaning apparatus
Also check out Jongpal Ahn's (Yongin-si, South Korea) applicant profile with 2 patent applications submitted.
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