Tokyo
Japan
2
2020-11-19
2
2021-10-05
These are the the leading inventors for applications assigned to TOKYO ELECTRON LIMI TED:
TOKYO ELECTRON LIMI TED based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate processing device and substrate transfer method
#2 | 2020-08-27 ✅ Patent 11,437,251 granted on 2022-09-06Substrate processing apparatus for producing mixed processing liquid
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