Yokohama
Japan
37
2025-05-15
28
2026-03-17
These are the the leading inventors for applications assigned to Lasertec Corporation:
Lasertec Corporation based in Yokohama, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
OPTICAL APPARATUS AND CONTROL METHOD OF OPTICAL APPARATUS
#2 | 2025-04-10IMAGE PROCESSING APPARATUS, INSPECTION APPARATUS, IMAGE PROCESSING METHOD, AND INSPECTION METHOD
#3 | 2025-03-27LIGHT SOURCE APPARATUS, INSPECTION APPARATUS, EXPOSURE APPARATUS, LIGHT SOURCE CONTROL METHOD, INSPECTION METHOD, AND EXPOSURE METHOD
#4 | 2025-03-27LIGHT SOURCE APPARATUS, INSPECTION APPARATUS, EXPOSURE APPARATUS, LIGHT SOURCE CONTROL METHOD, INSPECTION METHOD, AND EXPOSURE METHOD
#5 | 2025-01-09INSPECTION APPARATUS AND INSPECTION METHOD
#6 | 2024-10-31OPTICAL APPARATUS AND METHOD OF PREVENTING CONTAMINATION OF OPTICAL APPARATUS
#7 | 2024-10-10 ✅ Patent 12,578,281 granted on 2026-03-17DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
#8 | 2024-09-12 ✅ Patent 12,625,381 granted on 2026-05-12ILLUMINATION APPARATUS AND ILLUMINATION METHOD
#9 | 2024-08-29POSITION DETECTION APPARATUS, POSITION DETECTION METHOD, AND NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING POSITION DETECTION PROGRAM
#10 | 2024-08-22OPTICAL APPARATUS AND FOCUS CORRECTION METHOD
#11 | 2024-05-16 ✅ Patent 12,566,142 granted on 2026-03-03OPTICAL APPARATUS AND EXAMINATION APPARATUS
#12 | 2023-12-28 ✅ Patent 12,259,339 granted on 2025-03-25Light-source apparatus, inspection apparatus, and adjustment method
#13 | 2023-12-07 ✅ Patent 12,504,270 granted on 2025-12-23CALCULATION METHOD, IMAGE-CAPTURING METHOD, AND IMAGE-CAPTURING APPARATUS
#14 | 2023-11-23 ✅ Patent 12,607,838 granted on 2026-04-21CALCULATION METHOD, IMAGING-CAPTURING METHOD, AND IMAGE-CAPTURING APPARATUS
#15 | 2023-03-09 ✅ Patent 12,307,736 granted on 2025-05-20Image processing apparatus and image processing method
#16 | 2022-11-24 ✅ Patent 12,308,600 granted on 2025-05-20Light source apparatus and inspection apparatus
#17 | 2022-07-14 ✅ Patent 12,361,536 granted on 2025-07-15EUV MASK INSPECTION DEVICE, EUV MASK INSPECTION METHOD, NON-TRANSITORY COMPUTER-READABLE MEDIUM STORING EUV MASK INSPECTION PROGRAM, AND EUV MASK INSPECTION SYSTEM
#18 | 2022-06-09 ✅ Patent 12,050,184 granted on 2024-07-30Mask inspection method and mask inspection apparatus
#19 | 2021-12-02 ✅ Patent 11,353,802 granted on 2022-06-07Optical device, and method for preventing contamination of optical device
#20 | 2021-01-21 ✅ Patent 11,822,233 granted on 2023-11-21Image pickup apparatus and focus adjustment method using bending correction to adjust focusing
#21 | 2020-06-11 ✅ Patent 10,801,967 granted on 2020-10-13Mask inspection apparatus, switching method, and mask inspection method
#22 | 2020-03-19 ✅ Patent 10,761,400 granted on 2020-09-01Wavelength conversion apparatus and wavelength conversion method
#23 | 2020-02-06 ✅ Patent 11,486,693 granted on 2022-11-01Measurement apparatus and measurement method
#24 | 2019-09-12 ✅ Patent 10,712,287 granted on 2020-07-14Inspection device and inspection method
#25 | 2019-07-04 ✅ Patent 10,539,511 granted on 2020-01-21Detection method, inspection method, detection apparatus, and inspection apparatus
#26 | 2018-07-05 ✅ Patent 10,645,289 granted on 2020-05-05Optical apparatus and vibration removing method
#27 | 2017-12-14 ✅ Patent 10,106,334 granted on 2018-10-23Measurement apparatus, measurement method, and correction method
#28 | 2017-09-07 ✅ Patent 10,319,088 granted on 2019-06-11Inspection apparatus of EUV mask and its focus adjustment method
#29 | 2017-08-17 ✅ Patent 10,156,664 granted on 2018-12-18Mask inspection apparatus and mask inspection method
#30 | 2015-08-27 ✅ Patent 9,991,670 granted on 2018-06-05Laser light source device and inspection device
#31 | 2015-05-28 ✅ Patent 9,970,885 granted on 2018-05-15Inspection apparatus and inspection method
#32 | 2014-11-13 ✅ Patent 8,879,055 granted on 2014-11-04Inspection method and inspection apparatus
#33 | 2014-07-10 ✅ Patent 9,117,869 granted on 2015-08-25Chucking device and chucking method
#34 | 2014-05-15 ✅ Patent 9,638,729 granted on 2017-05-02Analysis apparatus and analysis method
#35 | 2013-09-19 ✅ Patent 9,638,739 granted on 2017-05-02Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask
#36 | 2011-06-09EFFICIENT PULSE LASER LIGHT GENERATION AND DEVICES USING THE SAME
#37 | 2005-02-22 ✅ Patent 6,858,859 granted on 2005-02-22Optically scanning apparatus and defect inspection system
Also check out Lasertec Corporation's (Yokohama, Japan) applicant profile with 45 patent applications submitted.
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