Japan
3
2005-05-26
3
2007-12-25
These are the the leading inventors for applications assigned to Anelva Corporation:
Anelva Corporation based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Semiconductor thin film forming system
#2 | 2005-03-01 ✅ Patent 6,861,614 granted on 2005-03-01S system for the formation of a silicon thin film and a semiconductor-insulating film interface
#3 | 2005-02-08 ✅ Patent 6,851,384 granted on 2005-02-08Remote plasma apparatus for processing substrate with two types of gases
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