South Korea
14
2023-09-07
14
2026-02-17
These are the the leading inventors for applications assigned to Eugene Technology Co., Ltd.:
Eugene Technology Co., Ltd. based in , KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
BATCH TYPE SUBSTRATE PROCESSING APPARATUS
#2 | 2023-08-10 ✅ Patent 12,243,724 granted on 2025-03-04Batch type substrate processing apparatus
#3 | 2022-10-13 ✅ Patent 12,598,955 granted on 2026-04-07SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
#4 | 2022-07-21 ✅ Patent 11,972,946 granted on 2024-04-30Method for removing impurities in thin film and substrate processing apparatus
#5 | 2018-09-27 ✅ Patent 10,692,745 granted on 2020-06-23Substrate processing apparatus
#6 | 2018-08-23 ✅ Patent 10,840,118 granted on 2020-11-17Substrate processing apparatus and method for assembling tube assembly
#7 | 2018-03-29 ✅ Patent 10,741,396 granted on 2020-08-11Substrate processing apparatus
#8 | 2018-03-29 ✅ Patent 10,199,225 granted on 2019-02-05Substrate processing apparatus
#9 | 2017-06-29 ✅ Patent 10,364,494 granted on 2019-07-30Substrate processing apparatus
#10 | 2017-05-18 ✅ Patent 10,793,949 granted on 2020-10-06Substrate processing apparatus and substrate processing method using the same
#11 | 2017-03-16 ✅ Patent 10,337,103 granted on 2019-07-02Substrate processing apparatus
#12 | 2017-03-16 ✅ Patent 10,161,036 granted on 2018-12-25Substrate processing apparatus
#13 | 2017-01-26 ✅ Patent 10,392,702 granted on 2019-08-27Substrate processing apparatus
#14 | 2006-07-27 ✅ Patent 7,326,438 granted on 2008-02-05Method for depositing nitride film using chemical vapor deposition apparatus of single chamber type
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