South Korea
7
2013-02-28
7
2013-10-01
These are the the leading inventors for applications assigned to ASM Genitech Korea Ltd.:
ASM Genitech Korea Ltd. based in , KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Atomic layer deposition apparatus
#2 | 2012-05-10 ✅ Patent 8,747,948 granted on 2014-06-10Deposition apparatus
#3 | 2011-12-22 ✅ Patent 8,215,264 granted on 2012-07-10Atomic layer deposition apparatus
#4 | 2009-11-12 ✅ Patent 8,076,242 granted on 2011-12-13Methods of forming an amorphous silicon thin film
#5 | 2009-04-23 ✅ Patent 8,273,408 granted on 2012-09-25Methods of depositing a ruthenium film
#6 | 2007-08-16 ✅ Patent 7,541,284 granted on 2009-06-02Method of depositing Ru films having high density
#7 | 2007-03-01 ✅ Patent 7,485,349 granted on 2009-02-03Thin film forming method
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