Seongnam-si
South Korea
7
2010-06-17
7
2013-06-11
These are the the leading inventors for applications assigned to ADP Engineering Co., Ltd.:
ADP Engineering Co., Ltd. based in Seongnam-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
System and method for introducing a substrate into a process chamber
#2 | 2010-06-17 ✅ Patent 8,462,008 granted on 2013-06-11System and method for introducing a substrate into a process chamber
#3 | 2009-06-04 ✅ Patent 8,363,377 granted on 2013-01-29Electrostatic chuck and apparatus having the same
#4 | 2009-03-12 ✅ Patent 7,980,287 granted on 2011-07-19Adhesive chuck and substrate bonding apparatus
#5 | 2008-06-12 ✅ Patent 8,388,781 granted on 2013-03-05Apparatus for attaching substrates and gap control unit thereof
#6 | 2008-05-29 ✅ Patent 7,750,818 granted on 2010-07-06System and method for introducing a substrate into a process chamber
#7 | 2008-05-15 ✅ Patent 7,988,817 granted on 2011-08-02Lift pin driving device and a flat panel display manufacturing apparatus having same
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