Japan
9
2011-10-06
9
2012-04-10
These are the the leading inventors for applications assigned to Sumco Corporation:
Sumco Corporation based in , JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Epitaxial silicon wafer and fabrication method thereof
#2 | 2009-04-09 ✅ Patent 7,977,221 granted on 2011-07-12Method for producing strained Si-SOI substrate and strained Si-SOI substrate produced by the same
#3 | 2009-03-26 ✅ Patent 8,105,436 granted on 2012-01-31Single crystal silicon wafer for insulated gate bipolar transistors and process for producing the same
#4 | 2008-07-24 ✅ Patent 8,655,471 granted on 2014-02-18Impurity amount control system for manufacturing single crystal and impurity amount control method for manufacturing single crystal
#5 | 2008-03-06 ✅ Patent 9,340,900 granted on 2016-05-17Epitaxial wafer and method of producing same
#6 | 2008-03-06 ✅ Patent 7,989,073 granted on 2011-08-02Epitaxial silicon wafer and fabrication method thereof
#7 | 2007-12-27 ✅ Patent 8,066,896 granted on 2011-11-29Apparatus for etching wafer by single-wafer process and single wafer type method for etching wafer
#8 | 2007-08-23 ✅ Patent 8,617,311 granted on 2013-12-31Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT
#9 | 2007-01-25 ✅ Patent 8,801,853 granted on 2014-08-12Mechanism for controlling melt level in single crystal pulling apparatus, method for controlling melt level in single crystal pulling apparatus, mechanism for adjusting melt level in single crystal pulling apparatus and method for adjusting melt level while pulling single crystal
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