Tokyo Eletctron Limited

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2009-03-12

Patent Grants:

Last grant date:

2011-09-06

Top Inventors for applications by Tokyo Eletctron Limited

These are the the leading inventors for applications assigned to Tokyo Eletctron Limited:

Tsuyoshi MORIYA 1 Nirasaki, Japan
Toshiya Matsuda 1 Nirasaki, Japan
Toshiya Matsuda 1 Nirasaki-shi, Japan
Tsuyoshi MORIYA 1 Nirasaki-shi, Japan

Recent patent applications by Tokyo Eletctron Limited

Tokyo Eletctron Limited based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2009-03-12 ✅ Patent 8,012,303 granted on 2011-09-06

US20090064760A1

Physics

Container cleanliness measurement apparatus and method, and substrate processing system

AssigneeID:

443290 ⎘