South Korea
3
2015-01-01
3
2016-10-25
These are the the leading inventors for applications assigned to Piezonics Co., Ltd.:
Piezonics Co., Ltd. based in , KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof
#2 | 2009-07-16 ✅ Patent 8,298,370 granted on 2012-10-30Apparatus for chemical vapor deposition (CVD) with showerhead
#3 | 2009-07-02 ✅ Patent 8,882,913 granted on 2014-11-11Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof
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