South Korea
4
2011-02-03
4
2013-02-12
These are the the leading inventors for applications assigned to Charm Engineering Co., Ltd.:
Charm Engineering Co., Ltd. based in , KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Plasma processing apparatus and method for plasma processing
#2 | 2010-11-18 ✅ Patent 8,864,936 granted on 2014-10-21Apparatus and method for processing substrate
#3 | 2010-04-22 ✅ Patent 8,980,049 granted on 2015-03-17Apparatus for supporting substrate and plasma etching apparatus having the same
#4 | 2010-03-11 ✅ Patent 8,888,950 granted on 2014-11-18Apparatus for plasma processing and method for plasma processing
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