Zao
Japan
2
2013-04-18
2
2015-08-04
These are the the leading inventors for applications assigned to MIYAGI NIKON PRECISION CO., LTD.:
MIYAGI NIKON PRECISION CO., LTD. based in Zao, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
#2 | 2011-10-27 ✅ Patent 9,110,381 granted on 2015-08-18Substrate conveyance device and substrate conveyance method, exposure apparatus and exposure method, device manufacturing method
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