Hwaseong-si
South Korea
2
2016-05-12
2
2018-07-31
These are the the leading inventors for applications assigned to APET:
APET based in Hwaseong-si, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Wafer cleaning apparatus and wafer cleaning method using the same
#2 | 2012-06-21 ✅ Patent 9,240,335 granted on 2016-01-19Wafer cleaning apparatus and wafer cleaning method using the same
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