Germany
3
2016-02-11
3
2018-02-13
These are the the leading inventors for applications assigned to Brooks Automation, GmbH:
Brooks Automation, GmbH based in , DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Redundantable robot assembly for workpiece transfer
#2 | 2013-01-31 ✅ Patent 9,728,436 granted on 2017-08-08Transfer mechanism with multiple wafer handling capability
#3 | 2011-08-18 ✅ Patent 10,770,323 granted on 2020-09-08Stackable substrate carriers
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