Tokyo
Japan
34
2015-06-25
33
2015-10-06
These are the the leading inventors for applications assigned to SEN CORPORATION:
SEN CORPORATION based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Supporting structure and ion generator using the same
#2 | 2015-03-05 ✅ Patent 9,343,262 granted on 2016-05-17Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method
#3 | 2015-03-05 ✅ Patent 9,117,627 granted on 2015-08-25Ion implantation apparatus and ion implantation method
#4 | 2014-12-25 ✅ Patent 8,952,340 granted on 2015-02-10High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision
#5 | 2014-12-04 ✅ Patent 9,281,160 granted on 2016-03-08Insulation structure and insulation method
#6 | 2014-12-04 ✅ Patent 8,987,690 granted on 2015-03-24High-energy ion implanter
#7 | 2014-12-04 ✅ Patent 9,390,890 granted on 2016-07-12High-energy ion implanter
#8 | 2014-11-27 ✅ Patent 9,355,847 granted on 2016-05-31High-energy ion implanter
#9 | 2014-10-02 ✅ Patent 9,117,630 granted on 2015-08-25Insulation structure of high voltage electrodes for ion implantation apparatus
#10 | 2014-09-25 ✅ Patent 10,030,304 granted on 2018-07-24Ion implantation apparatus and method of cleaning ion implantation apparatus
#11 | 2014-08-21 ✅ Patent 9,165,772 granted on 2015-10-20Ion implantation method and ion implantation apparatus
#12 | 2014-06-05 ✅ Patent 9,466,467 granted on 2016-10-11Ion implantation apparatus
#13 | 2014-05-15 ✅ Patent 9,208,996 granted on 2015-12-08Ion implantation apparatus and ion implantation method
#14 | 2014-03-06 ✅ Patent 9,379,030 granted on 2016-06-28Ion implantation method and ion implantation apparatus
#15 | 2014-03-06 ✅ Patent 9,208,983 granted on 2015-12-08Ion generation method and ion source
#16 | 2014-01-16 ✅ Patent 8,980,654 granted on 2015-03-17Ion implantation method and ion implantation apparatus
#17 | 2013-10-03 ✅ Patent 8,692,216 granted on 2014-04-08Ion implantation apparatus and control method thereof
#18 | 2013-09-26 ✅ Patent 9,153,405 granted on 2015-10-06Ion source device and ion beam generating method
#19 | 2013-08-01 ✅ Patent 9,305,784 granted on 2016-04-05Ion implantation method and ion implantation apparatus
#20 | 2013-06-20 ✅ Patent 9,646,837 granted on 2017-05-09Ion implantation method and ion implantation apparatus
#21 | 2013-04-18 ✅ Patent 8,759,801 granted on 2014-06-24Ion implantation apparatus and ion implantation method
#22 | 2013-01-24 ✅ Patent 9,312,163 granted on 2016-04-12Impurity-doped layer formation apparatus and electrostatic chuck protection method
#23 | 2012-12-20 ✅ Patent 9,601,314 granted on 2017-03-21Ion implantation apparatus and ion implantation method
#24 | 2012-10-04 ✅ Patent 8,772,741 granted on 2014-07-08Ion implantation method and ion implantation apparatus
#25 | 2012-09-27 ✅ Patent 8,772,142 granted on 2014-07-08Ion implantation method and ion implantation apparatus
#26 | 2012-03-01 ✅ Patent 9,023,720 granted on 2015-05-05Manufacturing method of semiconductor device
#27 | 2012-01-19PLASMA DOPING APPARATUS AND PLASMA DOPING METHOD
#28 | 2011-12-08 ✅ Patent 8,735,855 granted on 2014-05-27Ion beam irradiation system and ion beam irradiation method
#29 | 2011-06-09 ✅ Patent 8,163,635 granted on 2012-04-24Manufacturing method of semiconductor device
#30 | 2008-10-23 ✅ Patent 7,982,192 granted on 2011-07-19Beam processing apparatus
#31 | 2008-10-16 ✅ Patent 7,755,067 granted on 2010-07-13Ion implantation apparatus and method of converging/shaping ion beam used therefor
#32 | 2008-03-20 ✅ Patent 7,718,980 granted on 2010-05-18Beam processing system and beam processing method
#33 | 2008-01-03 ✅ Patent 7,411,709 granted on 2008-08-12Beam processing system and beam processing method
#34 | 2006-06-01 ✅ Patent 7,429,743 granted on 2008-09-30Irradiation system ion beam and method to enhance accuracy of irradiation
Also check out Sen Corporation's (Tokyo, Japan) applicant profile with 12 patent applications submitted.
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