South Korea
3
2022-10-20
3
2026-04-14
These are the the leading inventors for applications assigned to NPS CORPORATION:
NPS CORPORATION based in , KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
HEAT SOURCE DEVICE, SUBSTRATE SUPPORT DEVICE AND SUBSTRATE PROCESSING FACILITY
#2 | 2017-06-22 ✅ Patent 10,643,868 granted on 2020-05-05Apparatus for processing substrate
#3 | 2015-08-27 ✅ Patent 9,892,942 granted on 2018-02-13Substrate processing apparatus
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