Germany
14
2024-01-04
14
2026-02-10
These are the the leading inventors for applications assigned to Brooks Automation (Germany) GmbH:
Brooks Automation (Germany) GmbH based in , DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD
#2 | 2023-12-28 ✅ Patent 12,461,453 granted on 2025-11-04EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
#3 | 2023-06-01 ✅ Patent 11,978,652 granted on 2024-05-07Automatic handling buffer for bare stocker
#4 | 2023-01-19 ✅ Patent 12,288,697 granted on 2025-04-29Core module for semiconductor production facility machinery
#5 | 2021-02-18 ✅ Patent 12,087,603 granted on 2024-09-10Inspection system
#6 | 2020-05-21 ✅ Patent 12,487,186 granted on 2025-12-02INSPECTION SYSTEM AND METHOD OF INSPECTION FOR SUBSTRATE CONTAINERS
#7 | 2019-06-20 ✅ Patent 10,727,098 granted on 2020-07-28Reticle compartment and diffusor plate
#8 | 2018-10-04 ✅ Patent 12,148,642 granted on 2024-11-19Humidity control in semiconductor systems
#9 | 2016-08-25 ✅ Patent 10,529,609 granted on 2020-01-07Container storage add-on for bare workpiece stocker
#10 | 2015-01-08 ✅ Patent 9,919,871 granted on 2018-03-20Buffer station for stocker system
#11 | 2014-10-09 ✅ Patent 9,943,969 granted on 2018-04-17Clean transfer robot
#12 | 2013-01-24 ✅ Patent 10,096,500 granted on 2018-10-09Simultaneous wafer ID reading
#13 | 2012-12-27 ✅ Patent 10,096,461 granted on 2018-10-09Semiconductor cleaner systems and methods
#14 | 2012-12-27 ✅ Patent 10,043,651 granted on 2018-08-07Semiconductor cleaner systems and methods
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