Austin, Texas
United States
7
2023-02-16
7
2025-01-14
These are the the leading inventors for applications assigned to Nano-Master, Inc.:
Nano-Master, Inc. based in Austin, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD)
#2 | 2022-06-23 ✅ Patent 12,197,125 granted on 2025-01-14Mask and reticle protection with atomic layer deposition (ALD)
#3 | 2021-08-12 ✅ Patent 11,640,900 granted on 2023-05-02Electron cyclotron rotation (ECR)-enhanced hollow cathode plasma source (HCPS)
#4 | 2021-07-15 ✅ Patent 11,087,959 granted on 2021-08-10Techniques for a hybrid design for efficient and economical plasma enhanced atomic layer deposition (PEALD) and plasma enhanced chemical vapor deposition (PECVD)
#5 | 2018-09-20 ✅ Patent 10,361,088 granted on 2019-07-23Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)
#6 | 2018-09-20 ✅ Patent 10,366,898 granted on 2019-07-30Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)
#7 | 2018-05-15 ✅ Patent 9,972,501 granted on 2018-05-15Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)
Also check out Nano-Master, Inc.'s (Austin, United States) applicant profile with 9 patent applications submitted.
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