TOKYO ELECTRON LMITED

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2019-08-15

Patent Grants:

Last grant date:

2021-06-29

Top Inventors for applications by TOKYO ELECTRON LMITED

These are the the leading inventors for applications assigned to TOKYO ELECTRON LMITED:

Shinsuke OKA 1 Miyagi, Japan

Recent patent applications by TOKYO ELECTRON LMITED

TOKYO ELECTRON LMITED based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2019-08-15 ✅ Patent 11,049,743 granted on 2021-06-29

US20190252224A1

Electricity

Substrate processing apparatus, flow rate control method, and storage medium storing flow rate control program

AssigneeID:

590561 ⎘