Gyeonggi-do
South Korea
3
2015-03-05
1
2016-02-16
These are the the leading inventors for applications assigned to GEN CO., LTD.:
GEN CO., LTD. based in Gyeonggi-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
PLASMA PROCESSING APPARATUS FOR VAPOR PHASE ETCHING AND CLEANING
#2 | 2014-03-27ANTENNA ASSEMBLY AND A PLASMA PROCESSING CHAMBER HAVING THE SAME
#3 | 2012-08-23 ✅ Patent 9,263,237 granted on 2016-02-16Plasma processing apparatus and method thereof
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