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Assignee profile:

ULVAC, INC.

City:

Kanagawa

Country:

Japan

Published Applications:

297

Last publication date:

2026-04-09

Patent Grants:

217

Last grant date:

2025-11-11

Quarterly ULVAC, INC. Patent Applications

Top Inventors for applications by ULVAC, INC.

These are the the leading inventors for applications assigned to ULVAC, INC.:

Recent patent applications by ULVAC, INC.

ULVAC, INC. based in Kanagawa, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2026-04-09
US20260101683A1
Electricity

FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS

 #2 | 2026-01-01
US20260002252A1
Chemistry; metallurgy

SPUTTERING APPARATUS AND DEPOSITION METHOD OF TUNGSTEN FILM

 #3 | 2025-05-22
US20250167197A1
Electricity

PROCESS FOR PRE-LITHIATION AND EQUIPMENT FOR IMPLEMENTING THE SAME

 #4 | 2024-09-12 ✅ Patent 12,469,711 granted on 2025-11-11
US20240304453A1
Electricity

ETCHING METHOD

 #5 | 2024-09-12 ✅ Patent 12,606,903 granted on 2026-04-21
US20240301545A1
Chemistry; metallurgy

VACUUM EVAPORATION METHOD

 #6 | 2024-08-22
US20240279791A1
Chemistry; metallurgy

EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS

 #7 | 2024-08-22
US20240279790A1
Chemistry; metallurgy

EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS

 #8 | 2024-08-08 ✅ Patent 12,092,398 granted on 2024-09-17
US20240263876A1
Mechanical engineering

Freeze-drying device and freeze-drying method

 #9 | 2024-06-20 ✅ Patent 12,169,886 granted on 2024-12-17
US20240202998A1
Physics

Display device, display method, and storage medium

 #10 | 2024-04-11
US20240120233A1
Electricity

VACUUM PROCESSING APPARATUS

 #11 | 2024-02-29
US20240069519A1
Physics

INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD

 #12 | 2024-02-15 ✅ Patent 12,476,090 granted on 2025-11-18
US20240055239A1
Electricity

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING FILM, AND SILICON NITRIDE FILM

 #13 | 2023-12-28 ✅ Patent 12,614,698 granted on 2026-04-28
US20230420220A1
Electricity

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

 #14 | 2023-11-09
US20230357919A1
Chemistry; metallurgy

EVAPORATION SOURCE FOR USE IN VAPOR DEPOSITION APPARATUS

 #15 | 2023-09-07
US20230279536A1
Chemistry; metallurgy

VAPOR DEPOSITION SOURCE FOR VACUUM VAPOR DEPOSITION APPARATUS

 #16 | 2023-06-29 ✅ Patent 12,293,905 granted on 2025-05-06
US20230207295A1
Electricity

Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus

 #17 | 2023-05-04 ✅ Patent 12,112,929 granted on 2024-10-08
US20230138552A1
Electricity

Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus

 #18 | 2022-10-27 ✅ Patent 12,020,942 granted on 2024-06-25
US20220344167A1
Electricity

Etching method

 #19 | 2022-10-06
US20220316047A1
Chemistry; metallurgy

EVAPORATION SOURCE FOR VACUUM EVAPORATION APPARATUS

 #20 | 2022-09-15 ✅ Patent 12,040,153 granted on 2024-07-16
US20220293388A1
Electricity

Ion gun

 #21 | 2022-05-26
US20220162741A1
Chemistry; metallurgy

EVAPORATOR AND DEPOSITION APPARATUS

 #22 | 2022-05-19 ✅ Patent 11,891,685 granted on 2024-02-06
US20220154324A1
Chemistry; metallurgy

Vacuum processing apparatus

 #23 | 2022-05-12 ✅ Patent 11,434,562 granted on 2022-09-06
US20220145449A1
Chemistry; metallurgy

Can-roller for vacuum processing apparatus

 #24 | 2022-05-12 ✅ Patent 11,549,173 granted on 2023-01-10
US20220145445A1
Chemistry; metallurgy

Sputtering apparatus

 #25 | 2022-05-12
US20220145443A1
Chemistry; metallurgy

VAPOR DEPOSITION UNIT AND VACUUM VAPOR DEPOSITION APPARATUS PROVIDED WITH VAPOR DEPOSITION UNIT

 #26 | 2022-03-17 ✅ Patent 11,901,162 granted on 2024-02-13
US20220081774A1
Chemistry; metallurgy

Vacuum processing apparatus and method of cleaning vacuum processing apparatus

 #27 | 2022-02-24
US20220056571A1
Chemistry; metallurgy

Film Forming Method

 #28 | 2022-02-10 ✅ Patent 12,217,969 granted on 2025-02-04
US20220044938A1
Electricity

Silicon dry etching method

 #29 | 2021-10-28 ✅ Patent 11,335,853 granted on 2022-05-17
US20210336137A1
Electricity

Method of manufacturing OTS device, and OTS device

 #30 | 2021-10-14 ✅ Patent 11,923,178 granted on 2024-03-05
US20210319985A1
Electricity

Vacuum processing apparatus

 #31 | 2021-09-23 ✅ Patent 11,384,423 granted on 2022-07-12
US20210292886A1
Chemistry; metallurgy

Sputtering apparatus and sputtering method

 #32 | 2021-08-19 ✅ Patent 11,437,256 granted on 2022-09-06
US20210257238A1
Electricity

Housing case for crystal oscillator

 #33 | 2021-08-12 ✅ Patent 11,239,064 granted on 2022-02-01
US20210249241A1
Electricity

Magnet unit for magnetron sputtering apparatus

 #34 | 2021-08-12 ✅ Patent 11,239,063 granted on 2022-02-01
US20210249237A1
Electricity

Vacuum processing apparatus

 #35 | 2021-07-29
US20210230741A1
Chemistry; metallurgy

Film Forming Method

 #36 | 2021-07-22
US20210225681A1
Electricity

VACUUM PROCESSING APPARATUS

 #37 | 2021-07-15 ✅ Patent 11,230,760 granted on 2022-01-25
US20210214841A1
Chemistry; metallurgy

Sputtering apparatus and method of forming film

 #38 | 2021-07-01 ✅ Patent 11,319,627 granted on 2022-05-03
US20210198784A1
Chemistry; metallurgy

Vacuum processing apparatus

 #39 | 2021-05-13 ✅ Patent 11,345,992 granted on 2022-05-31
US20210140034A1
Chemistry; metallurgy

Vacuum deposition apparatus

 #40 | 2021-05-13 ✅ Patent 11,286,554 granted on 2022-03-29
US20210140033A1
Chemistry; metallurgy

Sputtering apparatus

 #41 | 2021-03-18
US20210079514A1
Chemistry; metallurgy

Sputtering Method and Sputtering Apparatus

 #42 | 2021-03-04 ✅ Patent 11,002,366 granted on 2021-05-11
US20210062921A1
Mechanical engineering

Gate valve device

 #43 | 2021-02-04 ✅ Patent 11,309,454 granted on 2022-04-19
US20210036186A1
Electricity

Deep ultraviolet LED and method for producing the same

 #44 | 2021-01-21 ✅ Patent 11,462,398 granted on 2022-10-04
US20210020426A1
Electricity

Ligand selection for ternary oxide thin films

 #45 | 2020-12-24 ✅ Patent 10,910,192 granted on 2021-02-02
US20200402759A1
Electricity

Ion source, ion implantation apparatus, and ion source operating method

 #46 | 2020-10-01 ✅ Patent 10,950,751 granted on 2021-03-16
US20200313041A1
Electricity

Deep ultraviolet LED and method for manufacturing the same

 #47 | 2020-07-09 ✅ Patent 10,991,591 granted on 2021-04-27
US20200219729A1
Electricity

Reactive ion etching apparatus

 #48 | 2020-06-18 ✅ Patent 10,670,486 granted on 2020-06-02
US20200191677A1
Physics

Pressure measurement system for judging power supply from terminal device to control section

 #49 | 2020-04-02 ✅ Patent 10,767,987 granted on 2020-09-08
US20200103225A1
Physics

Sensor head for crystal oscillator type of film thickness monitor

 #50 | 2020-03-12 ✅ Patent 11,056,323 granted on 2021-07-06
US20200080192A1
Chemistry; metallurgy

Sputtering apparatus and method of forming film

 #51 | 2020-02-27 ✅ Patent 11,195,929 granted on 2021-12-07
US20200066859A1
Electricity

Conformal replacement gate electrode for short channel devices

 #52 | 2020-01-02
US20200002807A1
Chemistry; metallurgy

VACUUM PROCESSING APPARATUS

 #53 | 2019-09-26 ✅ Patent 10,568,607 granted on 2020-02-25
US20190290244A1
Human necessities

Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probe

 #54 | 2019-07-04 ✅ Patent 10,770,275 granted on 2020-09-08
US20190206662A1
Electricity

Film forming unit for sputtering apparatus

 #55 | 2019-06-27 ✅ Patent 10,844,474 granted on 2020-11-24
US20190194798A1
Chemistry; metallurgy

Cathode unit for sputtering apparatus

 #56 | 2019-04-04 ✅ Patent 10,763,153 granted on 2020-09-01
US20190103301A1
Electricity

Holding apparatus

 #57 | 2019-03-14
US20190078196A1
Chemistry; metallurgy

FILM-FORMING METHOD AND SPUTTERING APPARATUS

 #58 | 2018-12-13
US20180355472A1
Chemistry; metallurgy

OXIDE-SINTERED-BODY SPUTTERING TARGET AND METHOD OF PRODUCING THE SAME

 #59 | 2018-11-22 ✅ Patent 11,049,976 granted on 2021-06-29
US20180337285A1
Electricity

Thin-film transistor, oxide semiconductor film, and sputtering target

 #60 | 2018-10-25
US20180305807A1
Chemistry; metallurgy

METHOD OF FORMING CARBON FILM

 #61 | 2018-08-30 ✅ Patent 10,680,134 granted on 2020-06-09
US20180248075A1
Electricity

Deep ultraviolet LED and method for manufacturing the same

 #62 | 2018-07-12 ✅ Patent 10,056,526 granted on 2018-08-21
US20180198026A1
Electricity

Deep ultraviolet LED and method for manufacturing the same

 #63 | 2018-06-21 ✅ Patent 10,283,610 granted on 2019-05-07
US20180175156A1
Electricity

Binary metal oxide based interlayer for high mobility channels

 #64 | 2018-06-07
US20180155821A1
Chemistry; metallurgy

Magnetron Sputtering Apparatus

 #65 | 2018-03-01
US20180057929A1
Chemistry; metallurgy

Method of Depositing Aluminum Oxide Film, Method of Forming the Same, and Sputtering Apparatus

 #66 | 2018-03-01
US20180057928A1
Chemistry; metallurgy

SPUTTERING APPARATUS

 #67 | 2018-02-15 ✅ Patent 9,929,526 granted on 2018-03-27
US20180048104A1
Electricity

Contact type power feeding apparatus

 #68 | 2018-02-08 ✅ Patent 10,217,835 granted on 2019-02-26
US20180040710A1
Electricity

Binary metal oxide based interlayer for high mobility channels

 #69 | 2018-02-08 ✅ Patent 10,217,834 granted on 2019-02-26
US20180040709A1
Electricity

Binary metal oxide based interlayer for high mobility channels

 #70 | 2018-02-08 ✅ Patent 9,972,695 granted on 2018-05-15
US20180040708A1
Electricity

Binary metal oxide based interlayer for high mobility channels

 #71 | 2018-02-01 ✅ Patent 10,378,102 granted on 2019-08-13
US20180030591A1
Chemistry; metallurgy

Rotary cathode unit for magnetron sputtering apparatus

 #72 | 2018-01-11 ✅ Patent 10,490,390 granted on 2019-11-26
US20180012734A1
Electricity

Substrate processing device

 #73 | 2017-12-14 ✅ Patent 9,929,317 granted on 2018-03-27
US20170358712A1
Electricity

Deep ultraviolet LED and method for manufacturing the same

 #74 | 2017-10-05 ✅ Patent 10,100,399 granted on 2018-10-16
US20170283941A1
Chemistry; metallurgy

Cathode assembly

 #75 | 2017-10-05 ✅ Patent 10,233,536 granted on 2019-03-19
US20170283940A1
Chemistry; metallurgy

Sputtering apparatus and method of discriminating state thereof

 #76 | 2017-09-21 ✅ Patent 10,435,783 granted on 2019-10-08
US20170268097A1
Chemistry; metallurgy

Target assembly

 #77 | 2017-08-10 ✅ Patent 9,972,479 granted on 2018-05-15
US20170229296A1
Electricity

Target assembly

 #78 | 2017-07-27 ✅ Patent 9,960,018 granted on 2018-05-01
US20170213706A1
Electricity

RF sputtering apparatus and sputtering method

 #79 | 2017-06-22
US20170178875A1
Electricity

INSULATOR TARGET

 #80 | 2017-06-15 ✅ Patent 9,837,251 granted on 2017-12-05
US20170169997A1
Electricity

Plasma etching method, plasma etching device, plasma processing method, and plasma processing device

 #81 | 2017-01-19
US20170018702A1
Electricity

METHOD OF MANUFACTURING MULTI-LAYERED FILM, AND MULTI-LAYERED FILM

 #82 | 2017-01-05
US20170005312A1
Electricity

Lithium-Sulfur Secondary Battery

 #83 | 2017-01-05
US20170004995A1
Electricity

Film Forming Apparatus and Film Forming Method

 #84 | 2017-01-05
US20170001239A1
Performing operations; transporting

Vacuum Melting and Casting Apparatus

 #85 | 2016-12-08
US20160359161A1
Electricity

Positive Electrode for Lithium-Sulfur Secondary Battery and Method of Forming the Same

 #86 | 2016-09-29
US20160285135A1
Electricity

LITHIUM-SULFUR SECONDARY BATTERY

 #87 | 2016-09-29 ✅ Patent 9,997,770 granted on 2018-06-12
US20160285075A1
Electricity

Lithium-sulfur secondary battery

 #88 | 2016-06-23 ✅ Patent 10,050,265 granted on 2018-08-14
US20160181600A1
Electricity

Positive electrode having sulfur contained in pores between nanocarbon structures, alkali metal-sulfur battery including the same, and method of preparing the positive electrode

 #89 | 2016-05-12 ✅ Patent 9,614,123 granted on 2017-04-04
US20160133785A1
Electricity

Deep ultraviolet LED and method for manufacturing the same

 #90 | 2016-02-11 ✅ Patent 9,929,311 granted on 2018-03-27
US20160042102A1
Physics

Semiconductor light emitting element and method for producing the same

 #91 | 2015-11-26 ✅ Patent 9,851,453 granted on 2017-12-26
US20150338528A1
Physics

Method of manufacturing radiological image conversion panel and radiological image conversion panel

 #92 | 2015-11-26 ✅ Patent 9,903,012 granted on 2018-02-27
US20150337430A1
Chemistry; metallurgy

Film formation method and film formation apparatus

 #93 | 2015-06-25 ✅ Patent 9,595,418 granted on 2017-03-14
US20150179395A1
Electricity

Ion beam irradiation device

 #94 | 2015-02-26
US20150056373A1
Chemistry; metallurgy

DEPOSITION METHOD AND DEPOSITION APPARATUS

 #95 | 2015-01-15 ✅ Patent 9,466,475 granted on 2016-10-11
US20150013715A1
Electricity

Ashing device

 #96 | 2014-12-11 ✅ Patent 9,343,207 granted on 2016-05-17
US20140361864A1
Electricity

Resistance change device, and method for producing same

 #97 | 2014-06-19 ✅ Patent 9,349,918 granted on 2016-05-24
US20140167066A1
Electricity

Light emitting element and method for manufacturing same

 #98 | 2014-06-19 ✅ Patent 9,281,477 granted on 2016-03-08
US20140166966A1
Electricity

Resistance change element and method for producing the same

 #99 | 2014-04-17 ✅ Patent 9,269,903 granted on 2016-02-23
US20140102879A1
Electricity

Method of manufacturing variable resistance element and apparatus for manufacturing the same

 #100 | 2014-02-27 ✅ Patent 8,921,135 granted on 2014-12-30
US20140057377A1
Electricity

Method for manufacturing device

Also check out ULVAC, INC.'s (Kanagawa, Japan) applicant profile with 79 patent applications submitted.

AssigneeID:

606 ⎘