Kanagawa
Japan
59
2024-08-29
57
2024-02-13
These are the the leading inventors for applications assigned to NUFLARE TECHNOLOGY, INC.:
NUFLARE TECHNOLOGY, INC. based in Kanagawa, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
METHOD FOR EVALUATING THERMIONIC ELECTRON EMITTER IN SITU
#2 | 2024-02-13 ā Patent 11,901,154 granted on 2024-02-13Conical heat shield for electron emitting cathode
#3 | 2023-12-21 ā Patent 12,131,883 granted on 2024-10-29Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
#4 | 2023-11-09 ā Patent 12,538,756 granted on 2026-01-27VAPOR PHASE GROWTH APPARATUS AND REFLECTOR
#5 | 2023-09-28 ā Patent 12,392,052 granted on 2025-08-19FILM DEPOSITION METHOD
#6 | 2023-08-10 ā Patent 12,165,834 granted on 2024-12-10Method and apparatus for Schottky TFE inspection
#7 | 2023-06-29 ā Patent 11,823,862 granted on 2023-11-21Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE)
#8 | 2022-11-17 ā Patent 11,640,896 granted on 2023-05-02Method and apparatus for Schottky TFE inspection
#9 | 2022-06-23 ā Patent 11,749,525 granted on 2023-09-05Vapor phase growth apparatus and vapor phase growth method
#10 | 2022-04-28 ā Patent 11,699,564 granted on 2023-07-11Schottky thermal field emitter with integrated beam splitter
#11 | 2021-06-24 ā Patent 11,615,938 granted on 2023-03-28High-resolution multiple beam source
#12 | 2020-09-17 ā Patent 11,022,428 granted on 2021-06-01Growth rate detection apparatus, vapor deposition apparatus, and vapor deposition rate detection method
#13 | 2020-07-02 ā Patent 11,145,485 granted on 2021-10-12Multiple electron beams irradiation apparatus
#14 | 2020-06-18 ā Patent 11,299,821 granted on 2022-04-12Vapor phase growth apparatus and vapor phase growth method
#15 | 2020-06-11 ā Patent 11,482,416 granted on 2022-10-25Vapor phase growth method
#16 | 2020-05-14 ā Patent 11,149,358 granted on 2021-10-19Vapor phase growth apparatus comprising n reactors, a primary gas supply path, a main secondary gas supply path, (nā1) auxiliary secondary gas supply paths, a first control circuit, and a second control circuit
#17 | 2020-04-30 ā Patent 11,047,047 granted on 2021-06-29Shower head, vapor phase growth apparatus, and vapor phase growth method
#18 | 2020-04-16 ā Patent 12,338,543 granted on 2025-06-24VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
#19 | 2020-03-17 ā Patent 10,593,505 granted on 2020-03-17Low temperature, high-brightness, cathode
#20 | 2020-02-25 ā Patent 10,573,481 granted on 2020-02-25Electron guns for electron beam tools
#21 | 2020-02-04 ā Patent 10,553,388 granted on 2020-02-04High-brightness lanthanum hexaboride cathode and method for manufacturing of cathode
#22 | 2020-01-02 ā Patent 10,796,877 granted on 2020-10-06Charged particle beam image acquisition apparatus
#23 | 2019-12-05 ā Patent 10,712,295 granted on 2020-07-14Electron beam inspection apparatus and electron beam inspection method
#24 | 2019-10-31 ā Patent 10,550,473 granted on 2020-02-04Shower head, vapor phase growth apparatus, and vapor phase growth method
#25 | 2019-10-03 ā Patent 10,790,110 granted on 2020-09-29Charged particle beam irradiation apparatus, charged particle beam image acquisition apparatus, and charged particle beam inspection apparatus
#26 | 2019-09-05 ā Patent 11,072,856 granted on 2021-07-27Vapor phase growth method
#27 | 2019-03-28 ā Patent 10,665,422 granted on 2020-05-26Electron beam image acquisition apparatus, and electron beam image acquisition method
#28 | 2019-03-14 ā Patent 10,770,481 granted on 2020-09-08Semiconductor device and method for manufacturing the same
#29 | 2019-01-24 ā Patent 10,468,232 granted on 2019-11-05Charged particle beam writing apparatus and charged particle beam writing method
#30 | 2018-10-11 ā Patent 10,488,334 granted on 2019-11-26Growth-rate measuring apparatus and growth-rate detection method
#31 | 2018-10-04 ā Patent 10,373,798 granted on 2019-08-06Multi charged particle beam inspection apparatus, and multi charged particle beam inspection method
#32 | 2018-08-09 ā Patent 10,619,996 granted on 2020-04-14Vapor phase growth rate measuring apparatus, vapor phase growth apparatus, and growth rate detection method
#33 | 2018-07-26 ā Patent 10,345,724 granted on 2019-07-09Position correction method of stage mechanism and charged particle beam lithography apparatus
#34 | 2018-06-21 ā Patent 10,351,949 granted on 2019-07-16Vapor phase growth method
#35 | 2018-05-03 ā Patent 10,283,314 granted on 2019-05-07Charged particle beam writing apparatus, and charged particle beam writing method
#36 | 2018-05-03 ā Patent 10,501,849 granted on 2019-12-10Film forming apparatus and film forming method
#37 | 2018-04-26 ā Patent 10,204,819 granted on 2019-02-12Vapor phase growth apparatus and ring-shaped holder having a curved mounting surface with convex and concave regions
#38 | 2018-03-29 ā Patent 10,157,768 granted on 2018-12-18Substrate processing apparatus, transfer method, and susceptor
#39 | 2018-03-29 ā Patent 10,287,707 granted on 2019-05-14Film growth apparatus, film growth method and maintenance method of film growth apparatus
#40 | 2018-03-08 ā Patent 10,373,793 granted on 2019-08-06Conductive contact point pin and charged particle beam apparatus
#41 | 2018-03-01 ā Patent 10,508,363 granted on 2019-12-17Vapor phase growth apparatus having substrate holder with ring-shaped protrusion
#42 | 2017-10-19 ā Patent 10,920,317 granted on 2021-02-16Shower head, vapor phase growth apparatus and vapor phase growth method
#43 | 2017-05-11 ā Patent 10,407,772 granted on 2019-09-10Shower head, vapor phase growth apparatus, and vapor phase growth method
#44 | 2017-01-12 ā Patent 10,011,901 granted on 2018-07-03Vapor deposition method and vapor deposition apparatus
#45 | 2016-09-29 ā Patent 10,151,637 granted on 2018-12-11Film forming apparatus and thermometry method
#46 | 2016-06-23 ā Patent 9,869,035 granted on 2018-01-16Vapor phase growth apparatus and vapor phase growth method
#47 | 2016-05-12 ā Patent 10,109,483 granted on 2018-10-23Vapor phase growth apparatus, storage container, and vapor phase growth method
#48 | 2016-04-21 ā Patent 9,995,632 granted on 2018-06-12Radiation thermometer and thermometry method
#49 | 2016-03-24 ā Patent 9,651,367 granted on 2017-05-16Curvature measuring in a substrate processing apparatus
#50 | 2016-02-04 ā Patent 10,132,001 granted on 2018-11-20Vapor phase growth apparatus and vapor phase growth method
#51 | 2015-11-12 ā Patent 9,269,532 granted on 2016-02-23Charged particle beam writing apparatus, and method for detecting irregularities in dose of charged particle beam
#52 | 2015-02-26 ā Patent 9,251,990 granted on 2016-02-02Method for producing a thermoelectron emission source and method for producing a cathode
#53 | 2014-12-18 ā Patent 9,803,282 granted on 2017-10-31Vapor phase growth apparatus
#54 | 2014-10-30 ā Patent 9,140,654 granted on 2015-09-22Inspection apparatus
#55 | 2014-10-30 ā Patent 9,299,531 granted on 2016-03-29Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method
#56 | 2014-08-28 ā Patent 9,535,015 granted on 2017-01-03Pattern inspection method and pattern inspection apparatus
#57 | 2014-07-17CHARGED PARTICLE BEAM WRITING METHOD
#58 | 2014-05-22 ā Patent 9,299,525 granted on 2016-03-29Thermionic cathode with even electric field distribution on electron emitting surface
#59 | 2014-04-10 ā Patent 9,165,737 granted on 2015-10-20High-brightness, long life thermionic cathode and methods of its fabrication
Also check out NUFLARE TECHNOLOGY, INC.'s (Kanagawa, Japan) applicant profile with 55 patent applications submitted.
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