Aachen
Germany
8
2014-04-17
8
2015-05-05
These are the the leading inventors for applications assigned to XTREME technologies GmbH:
XTREME technologies GmbH based in Aachen, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Device for generating short-wavelength electromagnetic radiation based on a gas discharge plasma
#2 | 2012-10-04 β Patent 8,410,422 granted on 2013-04-02Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasma
#3 | 2012-06-21 β Patent 8,610,354 granted on 2013-12-17Method and apparatus for the generation of short-wavelength radiation by means of a gas discharge-based high-frequency, high-current discharge
#4 | 2012-06-07 β Patent 8,686,372 granted on 2014-04-01Method for the spatially resolved measurement of parameters in a cross section of a beam bundle of high-energy radiation of high intensity
#5 | 2012-05-10 β Patent 8,546,775 granted on 2013-10-01Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma
#6 | 2012-04-05 β Patent 8,426,834 granted on 2013-04-23Method and apparatus for the generation of EUV radiation from a gas discharge plasma
#7 | 2011-05-05 β Patent 8,519,367 granted on 2013-08-27Extreme UV radiation generating device comprising a corrosion-resistant material
#8 | 2010-11-11 β Patent 8,154,000 granted on 2012-04-10Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
Also check out XTREME technologies GmbH's (Aachen, Germany) applicant profile with 1 patent applications submitted.
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