Sacramento, California
United States
3
2006-02-28
3
2006-02-28
These are the the leading inventors for applications assigned to Ebara Technologies, Inc.:
Ebara Technologies, Inc. based in Sacramento, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Chemical mechanical polishing and pad dressing method
#2 | 2005-07-12 ✅ Patent 6,916,226 granted on 2005-07-12Chemical mechanical polishing apparatus having a stepped retaining ring and method for use thereof
#3 | 2005-07-05 ✅ Patent 6,913,514 granted on 2005-07-05Chemical mechanical polishing endpoint detection system and method
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