Kanagawa
Japan
3
2006-01-31
3
2006-01-31
These are the the leading inventors for applications assigned to Semiconductor Leading Edge Technologies, Inc.:
Semiconductor Leading Edge Technologies, Inc. based in Kanagawa, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Method of forming a fine pattern using a silicon-oxide-based film, semiconductor device with a silicon-oxide-based film and method of manufacture thereof
#2 | 2005-04-19 ✅ Patent 6,880,563 granted on 2005-04-19Apparatus and method of cleaning a substrate
#3 | 2005-04-05 ✅ Patent 6,875,971 granted on 2005-04-05Wafer edge exposure apparatus, and wafer edge exposure method
691609 ⎘