San Jose, California
United States
2
2005-11-22
2
2005-11-22
These are the the leading inventors for applications assigned to Multi-Planar Technologies, Inc.:
Multi-Planar Technologies, Inc. based in San Jose, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control
#2 | 2005-05-17 ✅ Patent 6,893,327 granted on 2005-05-17Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surface
693290 ⎘