Tokyo
Japan
7
2024-06-13
6
2025-04-15
These are the the leading inventors for applications assigned to Tokyo Electronic Limited:
Tokyo Electronic Limited based in Tokyo, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Substrate processing apparatus and method for determining deterioration degree of conductive pipe
#2 | 2016-04-28 ✅ Patent 10,400,760 granted on 2019-09-03Liquid delivery method, liquid delivery system, and computer-readable storage medium
#3 | 2014-10-02SILICON OXIDE FILM FORMING METHOD AND SILICON OXIDE FILM FORMING APPARATUS
#4 | 2006-09-21 ✅ Patent 7,815,740 granted on 2010-10-19Substrate mounting table, substrate processing apparatus and substrate processing method
#5 | 2006-05-18 ✅ Patent 7,629,557 granted on 2009-12-08Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer
#6 | 2006-01-31 ✅ Patent 6,992,500 granted on 2006-01-31Prober and probe testing method for temperature-controlling object to be tested
#7 | 2005-01-27 ✅ Patent 7,163,887 granted on 2007-01-16Method for fabricating a semiconductor device
Also check out Tokyo Electronic Limited's (Tokyo, Japan) applicant profile with 3 patent applications submitted.
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