Toyko
Japan
8
2022-11-24
7
2025-05-13
These are the the leading inventors for applications assigned to EBARA CORPORATION:
EBARA CORPORATION based in Toyko, JP has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Subfab area installation apparatus
#2 | 2022-11-17MULTI-REFRIGERATION-CYCLE APPARATUS
#3 | 2022-01-06 ✅ Patent 12,237,194 granted on 2025-02-25Substrate transporter and substrate processing apparatus including substrate transporter
#4 | 2021-06-10 ✅ Patent 11,618,123 granted on 2023-04-04Polishing method and polishing apparatus
#5 | 2020-09-17 ✅ Patent 11,069,563 granted on 2021-07-20Method for processing substrate and substrate processing apparatus
#6 | 2014-12-04 ✅ Patent 9,956,524 granted on 2018-05-01Vacuum pump with abatement function
#7 | 2014-12-04 ✅ Patent 9,630,296 granted on 2017-04-25Substrate processing apparatus
#8 | 2014-11-13 ✅ Patent 9,824,903 granted on 2017-11-21Substrate cleaning apparatus
Also check out EBARA CORPORATION's (Toyko, Japan) applicant profile with 4 patent applications submitted.
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