Munich
Germany
11
2019-02-28
11
2020-11-03
These are the the leading inventors for applications assigned to attocube Systems AG:
attocube Systems AG based in Munich, DE has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Electromechanical actuator
#2 | 2017-11-02 ✅ Patent 10,794,626 granted on 2020-10-06Cooled table
#3 | 2017-10-26 ✅ Patent 10,505,470 granted on 2019-12-10Stick-slip drive, especially piezo-actuated inertial drive
#4 | 2017-08-17 ✅ Patent 11,092,512 granted on 2021-08-17Optical table
#5 | 2017-02-16 ✅ Patent 10,260,863 granted on 2019-04-16Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems
#6 | 2016-06-23 ✅ Patent 10,134,975 granted on 2018-11-20Electromechanical actuator
#7 | 2015-01-15 ✅ Patent 9,829,306 granted on 2017-11-28Absolute distance laser interferometer
#8 | 2011-09-01 ✅ Patent 8,773,666 granted on 2014-07-08Device and method for acquiring position with a confocal Fabry-Perot interferometer
#9 | 2010-10-14 ✅ Patent 8,570,529 granted on 2013-10-29Device for position detection
#10 | 2008-06-26 ✅ Patent 7,579,752 granted on 2009-08-25Positioning device with a solid-body joint
#11 | 2005-09-06 ✅ Patent 6,940,210 granted on 2005-09-06Inertial rotation device
Also check out attocube Systems AG's (Munich, Germany) applicant profile with 4 patent applications submitted.
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