Dublin, Pennsylvania
United States
18
2014-07-10
15
2014-05-06
These are the the leading inventors for applications assigned to Quantum Global Technologies, LLC:
Quantum Global Technologies, LLC based in Dublin, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
System and Method for Cleaning Semiconductor Fabrication Equipment Parts
#2 | 2014-03-20REMOVING RESIDUES FROM SUBSTRATE PROCESSING COMPONENTS
#3 | 2013-07-04 ✅ Patent 8,714,166 granted on 2014-05-06Method and apparatus for showerhead cleaning
#4 | 2013-02-14 ✅ Patent 8,691,023 granted on 2014-04-08Methods and apparatus for cleaning deposition chamber parts using selective spray etch
#5 | 2012-01-05 ✅ Patent 9,068,273 granted on 2015-06-30Electrochemical removal of tantalum-containing materials
#6 | 2011-03-17 ✅ Patent 8,372,211 granted on 2013-02-12Method and apparatus for showerhead cleaning
#7 | 2010-03-11 ✅ Patent 8,142,989 granted on 2012-03-27Textured chamber surface
#8 | 2009-12-01 ✅ Patent 7,624,742 granted on 2009-12-01Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipment
#9 | 2009-09-03Methods For Producing Quartz Parts With Low Defect And Impurity Densities For Use In Semiconductor Processing
#10 | 2009-08-06 ✅ Patent 8,097,089 granted on 2012-01-17Methods for cleaning process kits and chambers, and for ruthenium recovery
#11 | 2009-06-02 ✅ Patent 7,541,094 granted on 2009-06-02Firepolished quartz parts for use in semiconductor processing
#12 | 2009-02-12 ✅ Patent 8,492,674 granted on 2013-07-23Methods and apparatus for ex situ seasoning of electronic device manufacturing process components
#13 | 2008-09-23 ✅ Patent 7,427,330 granted on 2008-09-23Cleaning bench for removing contaminants from semiconductor process equipment
#14 | 2006-09-19 ✅ Patent 7,108,002 granted on 2006-09-19Steam cleaning system and method for semiconductor process equipment
#15 | 2005-10-06 ✅ Patent 7,267,132 granted on 2007-09-11Methods for removing silicon and silicon-nitride contamination layers from deposition tubes
#16 | 2005-10-06 ✅ Patent 7,073,522 granted on 2006-07-11Apparatus for applying disparate etching solutions to interior and exterior surfaces
#17 | 2005-08-30 ✅ Patent 6,936,114 granted on 2005-08-30Steam cleaning system and method for semiconductor process equipment
#18 | 2005-08-09 ✅ Patent 6,926,016 granted on 2005-08-09System for removing contaminants from semiconductor process equipment
Also check out Quantum Global Technologies, LLC's (Dublin, United States) applicant profile with 1 patent applications submitted.
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