Yongin-si, Gyeonggi-do
South Korea
41
2026-03-19
33
2025-08-19
These are the the leading inventors for applications assigned to EUGENE TECHNOLOGY CO., LTD.:
EUGENE TECHNOLOGY CO., LTD. based in Yongin-si, Gyeonggi-do, KR has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#2 | 2025-01-23LIFT PIN PROTECTION ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
#3 | 2023-03-16 ✅ Patent 12,392,554 granted on 2025-08-19APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF OPERATING THE SAME
#4 | 2023-01-05 ✅ Patent 12,488,963 granted on 2025-12-02SUBSTRATE PROCESSING APPARATUS
#5 | 2022-10-20 ✅ Patent 12,243,767 granted on 2025-03-04Substrate support assembly and substrate processing apparatus
#6 | 2022-09-01APPARATUS FOR PROCESSING SUBSTRATE WITH PLASMA
#7 | 2022-03-24APPARATUS FOR PROCESSING SUBSTRATE
#8 | 2022-02-17METHOD FOR FORMING A THIN FILM
#9 | 2020-12-17APPARATUS AND METHOD OF PROCESSING A SUBSTRATE
#10 | 2020-08-20 ✅ Patent 11,242,601 granted on 2022-02-08Showerhead and substrate processing apparatus including the same
#11 | 2020-07-30PLASMA PROCESSING APPARATUS
#12 | 2019-12-19 ✅ Patent 10,892,139 granted on 2021-01-12ICP antenna and substrate processing device including the same
#13 | 2019-10-03 ✅ Patent 10,796,915 granted on 2020-10-06Method for forming epitaxial layer at low temperature
#14 | 2018-04-26 ✅ Patent 10,246,773 granted on 2019-04-02Method for forming amorphous thin film
#15 | 2017-12-28 ✅ Patent 10,283,391 granted on 2019-05-07Multiple gases providing method and multiple gases providing apparatus
#16 | 2017-06-22 ✅ Patent 9,741,562 granted on 2017-08-22Method for forming polysilicon film
#17 | 2017-05-25 ✅ Patent 10,593,545 granted on 2020-03-17Method for substrate processing using exhaust ports
#18 | 2017-05-25 ✅ Patent 9,818,604 granted on 2017-11-14Method for depositing insulating film on recessed portion having high aspect ratio
#19 | 2017-04-20 ✅ Patent 10,622,228 granted on 2020-04-14Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
#20 | 2016-10-13 ✅ Patent 9,741,574 granted on 2017-08-22Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device
#21 | 2016-10-06 ✅ Patent 10,287,687 granted on 2019-05-14Substrate processing device
#22 | 2016-10-06 ✅ Patent 10,145,012 granted on 2018-12-04Substrate processing apparatus and substrate processing method
#23 | 2016-07-21 ✅ Patent 9,721,798 granted on 2017-08-01Method and apparatus for depositing amorphous silicon film
#24 | 2016-07-07 ✅ Patent 10,229,845 granted on 2019-03-12Substrate treatment apparatus
#25 | 2016-02-18 ✅ Patent 10,192,760 granted on 2019-01-29Substrate supporting unit, substrate processing apparatus, and method of manufacturing substrate supporting unit
#26 | 2016-01-14 ✅ Patent 9,368,380 granted on 2016-06-14Substrate processing device with connection space
#27 | 2015-10-22 ✅ Patent 9,758,870 granted on 2017-09-12Substrate treatment apparatus, and method for controlling temperature of heater
#28 | 2015-09-10SUBSTRATE PROCESSING APPARATUS
#29 | 2015-02-12 ✅ Patent 9,644,895 granted on 2017-05-09Heater moving type substrate processing apparatus
#30 | 2015-01-15 ✅ Patent 9,593,415 granted on 2017-03-14Substrate processing apparatus including auxiliary gas supply port
#31 | 2014-11-27 ✅ Patent 9,953,850 granted on 2018-04-24Substrate processing apparatus including heat-shield plate
#32 | 2014-11-27 ✅ Patent 9,620,395 granted on 2017-04-11Apparatus for processing substrate for supplying reaction gas having phase difference
#33 | 2014-10-23 ✅ Patent 9,875,895 granted on 2018-01-23Substrate processing apparatus including exhaust ports and substrate processing method
#34 | 2014-10-23 ✅ Patent 9,593,418 granted on 2017-03-14Showerhead having cooling system and substrate processing apparatus including the showerhead
#35 | 2014-09-18 ✅ Patent 10,006,121 granted on 2018-06-26Method and apparatus for manufacturing three-dimensional-structure memory device
#36 | 2014-07-24 ✅ Patent 9,493,875 granted on 2016-11-15Shower head unit and chemical vapor deposition apparatus
#37 | 2014-06-26 ✅ Patent 9,761,473 granted on 2017-09-12Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit
#38 | 2013-07-18 ✅ Patent 9,416,451 granted on 2016-08-16Substrate processing device equipped with semicircle shaped antenna
#39 | 2013-07-11 ✅ Patent 9,396,954 granted on 2016-07-19Method and apparatus for manufacturing three-dimensional-structure memory device
#40 | 2011-08-18 ✅ Patent 9,564,294 granted on 2017-02-07Plasma treatment apparatus and plasma antenna
#41 | 2011-01-27 ✅ Patent 8,312,840 granted on 2012-11-20Substrate processing apparatus and method
Also check out EUGENE TECHNOLOGY CO., LTD.'s (Yongin-si, Gyeonggi-do, South Korea) applicant profile with 25 patent applications submitted.
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