UV assisted polymer modification and in situ exhaust cleaning

System and method of exhaust-gas treatment

Effluent gas scrubbing

TRAP APPARATUS, EXHAUST SYSTEM AND PROCESSING SYSTEM USING SAME

METHODS AND APPARATUS FOR ABATING ELECTRONIC DEVICE MANUFACTURING PROCESS EFFLUENT

Adsorptive filter material

Configurations and methods for gas condensate separation from high-pressure hydrocarbon mixtures

Low-profile surface mount filter

Removal of impurities from hydrogen-containing materials

Method for abating effluent from an etching process

Absorbent

Compressed air producing method and producing plant

Hazardous gas abatement method

Waste gas purification apparatus

Plasma scrubber

Apparatus For Trapping Residual Product Of Semiconductor Manufacturing Process

Systems and methods for treating flammable effluent gases from manufacturing processes

Apparatus and method for providing heated effluent gases to a scrubber

Method of treating a gas stream

SYSTEM AND METHODS FOR CONSERVATION OF EXHAUST HEAT ENERGY

HELIUM RECOVERY FROM SEMICONDUCTOR CLUSTER TOOLS

Plasma treatment device

Rectangular parallelepiped fluid storage and dispensing vessel

POLLUTION TREATMENT DEVICE FOR VOLATILE ORGANIC GAS

Effluent gas recovery process for silicon production

EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION

Substrate treating apparatus and substrate treating method

APPARATUS FOR DECOMPOSING SUFLUR-FLUORINE-CONTAINING COMPOUND AND METHOD THEREOF

Method of producing high purity steam

Method for catalytic treating perfluorocompound gas including particle removing unit

Method for separating and recovering conversion reaction gas

Method for removing halogen series gas and agent for removing halogen series gas

Methods and apparatus for smart abatement using an improved fuel circuit

Gas Treating Apparatus

Method and apparatus for pressure swing adsorption

Byproduct collecting apparatus of semiconductor apparatus

Methods for starting and operating a thermal abatement system

Method for treatment of a gas stream containing silicon tetrafluoride and hydrogen chloride

Apparatus and methods for ambient air abatement of electronic manufacturing effluent

Apparatus and method for separating gas

Apparatus and method for separating gas

EXHAUST GAS TREATMENT SYSTEM

Method and apparatus for processing inorganic acidic gas

METHODS AND SYSTEMS FOR DESIGNING AND VALIDATING OPERATION OF ABATEMENT SYSTEMS

EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES

Nanoporous articles and methods of making same

Multi-functional Polymer-Entrapped-Cell-Bead airlift bioreactor for odor or gaseous emission treatment

Catalysts for treating acid and halogen gases and production methods thereof

Air handling and chemical filtration system and method

Agent for rendering halogen-containing gas harmless, and method of rendering halogen-containing gas harmless using same

Methods and systems for purifying gases

SCRUBBER SYSTEM IN SEMICONDUCTOR

Semiconductor manufacturing system and method of manufacturing semiconductor device

Method and apparatus for cleaning the waste gases from a silicon thin-film production plant

Low pressure drop canister for fixed bed scrubber applications and method of using same

System and Method of Exhaust-Gas Treatment

Decomposing catalyst for perfluorinated compound, carbon hydrofluoride, perchloro-carbon and carbon hydrochloride gas compounds and method of producing it

Method for the recovery and re-use of process gases

Removal Of Metal Contaminants From Ultra-High Purity Gases

TREATMENT OF EFFLUENT CONTAINING CHLORINE-CONTAINING GAS

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged and impregnated zeolite

System and method for removing contaminants

PROCESS FOR REMOVING TAR-FORMING HIGH MOLECULAR WEIGHT HYDROCARBONS FROM GAS MIXTURE

SYSTEMS AND METHODS FOR OPERATING AND MONITORING ABATEMENT SYSTEMS

Effluent gas scrubber and method of scrubbing effluent gasses

Sulfur hexafluoride recycling system and method for recycling sulfur hexafluoride

Process for refining nitrogen trifluoride gas using alkali earth metal exchanged zeolite

Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom

Method For Treating Gases By High Frequency Discharges

Method and apparatus for treating gas containing flourine-containing compounds

Method of separating nitrogen gas and molecular sieve carbon

Method of treating a gas stream

Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases

Gaseous effluent treatment apparatus

Method for blending and recirculating deuterium-containing gas

METHODS AND APPARATUS FOR PREVENTING DEPOSITION OF REACTION PRODUCTS IN PROCESS ABATEMENT REACTORS

METHOD AND APPARATUS FOR PURIFYING A GAS CONTAINING CONTAMINANTS

Low-profile surface mount filter

Chemical filter

Methods and apparatus for sensing characteristics of the contents of a process abatement reactor

Apparatus for manufacturing a process abatement reactor

METHODS AND APPARATUS FOR SELECTIVELY COUPLING PROCESS TOOLS TO ABATEMENT REACTORS

Gas purifier

EFFLUENT GAS STREAM TREATMENT SYSTEM HAVING UTILITY FOR OXIDATION TREATMENT OF SEMICONDUCTOR MANUFACTURING EFFLUENT GASES

METHOD AND APPARATUS FOR DECOMMISSIONING AND RECYCLING RETIRED ADSORBENT-BASED FLUID STORAGE AND DISPENSING VESSELS

System, apparatus and method for concentrating chemical vapors

PRODUCTION APPARATUS FOR PRODUCING GALLIUM NITRIDE FILM SEMICONDUCTOR AND CLEANING APPARATUS FOR EXHAUST GAS

CHEMICAL FILTER ARRANGEMENT FOR ASEMICONDUCTOR MANUFACTURING APPARATUS

Method and apparatus for collecting chemical compounds from semiconductor processing

Set of processes for removing impurities from a silcon production facility

Methods and apparatus for process abatement

Integrated chamber cleaning system

Variable exhaust static pressure management apparatus

Method for Separating Gaseous Components from Gaseous Media and Filter for Performing the Method

Scrubber for processing semiconductor waste gas

Apparatus and method for controlled decomposition oxidation of gaseous pollutants

Adsorption apparatus, semiconductor device manufacturing facility comprising the same, and method of recycling perfulorocompounds

Gas purification with carbon based materials

Rigid adsorption apparatus, and methods

Apparatus and method for collecting residual products for FPD and semiconductor

Purifier

Chemical filter and fan filter unit having the same

Filters employing both acidic polymers and physical-adsorption media

Treatment of effluent gases

Deozonating device with integrated heat exchanger

Gas scrubbing method using electric energy and fossil fuel and gas scrubber thereof

Process for treating fluorine compound-containing gas

Xenon recovery system

Safety, monitoring and control features for thermal abatement reactor

Process byproduct trap and system including same

Method and apparatus for processing inorganic acidic gas

Utilisation of waste gas streams

Process for treating fluorine compound-containing gas

Hydrogen peroxide abatement of metal hydride fumes

Rectangular parallelepiped fluid storage and dispending vessel

Method for removing harmful substance in vent gas

Vapor deposition systems and methods

Gas purification system with an integrated hydrogen sorption and filter assembly

Hazardous gas abatement system using electrical heater and water scrubber

Drain device for high negative pressure exhaust system

Chemical filter arrangement for a semiconductor manufacturing apparatus

Method of removing tar-forming gases from CVD/CVI furnace effluent

Process for recovering rare gases using gas-recovering container

Adsorption filter and manufacturing method thereof

Method for clarifying exhaust gas

Hazardous gas abatement system using electrical heater and water scrubber

Abatement device

Methods and apparatus for disposal of hydrogen from fluorine generation, and fluorine generators including same

Liquid trap for a vacuum line

Method and apparatus for the preparation of clean gases

Dehumidification system and dehumidification method

Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas

Exhaust conditioning system for semiconductor reactor

Combined chemical agent and dynamic oxidation treatment of hazardous gas

Plasma-based gas treatment system integrated in a vacuum pump

Method and apparatus for the recovery of volatile organic compounds and concentration thereof

Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement

Gas cabinet including integrated effluent scrubber

Air handling and chemical filtration system and method

Modular system for the treatment of process exhaust gases containing pollutants

Method and apparatus for filtering contaminants

Process byproduct trap, methods of use, and system including same

Chemisorbent system for abatement of effluent species

Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

Filters employing both acidic polymers and physical-adsorption media

Method for removing the harmful effects of organic halogen compound gas, apparatus for removing the harmful effects of organic halogen compound gas, system for fabricating semiconductor devices, and method for fabricating semiconductor devices

Semiconductor waste gas processing device with flame path

Adsorptive duct for contaminant removal, and methods

Gas separation method and device

Catalytic abatement system for semiconductor manufacturing process

Flexible fuel system for combustion abatement

Carbon dioxide and nitrogen oxides removal system for point of use abatement

Retrofittable dry media abatement reactor

Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower