B08B2203/002 - CPC Classification Index

ClassID:

37600 ⎘

B08B2203/002 - CPC Classification

Classification description:

Details of cleaning machines or methods involving the use or presence of liquid or steam the liquid being a degassed liquid

Recent Application in this class:

20240091822

2024-03-21

LIQUID CHEMICAL TANK MODULE AND LIQUID CHEMICAL SUPPLY APPARATUS INCLUDING THE SAME

20230347387

2023-11-02

WAFER CLEANING WATER SUPPLY DEVICE

20230256479

2023-08-17

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

20210276052

2021-09-09

Substrate processing method and substrate processing device

20210138512

2021-05-13

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

20200035484

2020-01-30

SYSTEM AND METHOD FOR CHEMICAL AND HEATED WETTING OF SUBSTRATES PRIOR TO METAL PLATING

20190378729

2019-12-12

Removal of process effluents

20190217345

2019-07-18

Radiation hardened ultrasonic cleaning system

20180185795

2018-07-05

Liquid supply unit, substrate treating apparatus, and method for removing bubbles

#10

20180169712

2018-06-21

Substrate treatment apparatus and substrate treatment method

#11

20170236729

2017-08-17

Liquid processing method, substrate processing apparatus, and storage medium

#12

20050188751

2005-09-01

Sensing system for measuring cavitation

#13

20050017599

2005-01-27

Apparatus, circuitry, signals and methods for cleaning and/or processing with sound