37556 ⎘
Cleaning hollow articles by methods or apparatus specially adapted thereto; Cleaning containers, e.g. tanks by burning-out
METHOD FOR CLEANING PROCESS CHAMBER AND APPLICATION THEREOF
#2PRESSURE DECONTAMINATION SYSTEM PROVIDING FAST CLEANING AGAINST CBRN THREATS SUITABLE FOR USE IN MILITARY VEHICLES AND INFRASTRUCTURES
#3Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
#4Rapid chamber clean using concurrent in-situ and remote plasma sources
#5Decoking process
#6ENDPOINT DETECTION FOR A CHAMBER CLEANING PROCESS
#7System and method for controlling detecting and cleaning diesel-exhaust-fluid injector deposits
#8Aluminum fluoride mitigation by plasma treatment
#9CONTROLLING DRY ETCH PROCESS CHARACTERISTICS USING WAFERLESS DRY CLEAN OPTICAL EMISSION SPECTROSCOPY
#10Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy
#11Method for cleaning substrate
#12Method for cleaning plasma processing chamber and substrate
#13On-line cleaning control system and control method for carbon deposits in direct injection engine fuel system
#14HIGH POWER LASER SYSTEMS AND METHODS FOR MERCURY, HEAVY METAL AND HAZARDOUS MATERIAL REMOVAL