44166 ⎘
Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
MACHINING DEVICE
#2MOBILE MACHINE TOOL
#3Direct pose feedback control method and direct pose feedback controlled machine
#4Tool device and method for measuring a condition of a machining tool
#5Multi-degree-of-freedom error measurement system for rotary axes and method thereof
#6Measurement, calibration and compensation system and method for machine tool
#7Manufacturing system
#8Error measurement method and machine tool
#9Precision feeding device and precision transfer equipment
#10Precision transfer equipment
#11Measuring apparatus and measuring method thereof, apparatus for correcting processing position of cutting machine and method thereof for correcting processing position, and imaging apparatus and cutting machine comprising the same
#12Method of detecting a dynamic path of a five-axis machine tool and dectecting assembly for the same
#13Chucking fixture with device for measuring the distance between a chunk and a toolholder or workholder
#14Positioning apparatus, exposure apparatus, and device manufacturing method
#15Two-dimensional nanopositioner with crude and fine stages
#16Method for calibrating the geometry of a multi-axis metrology system