SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREOF

Mounting system for a grinding machine

METHOD OF GRINDING AND TURNING A WORKPIECE

Transport carrier, deposition apparatus, and electronic device manufacturing apparatus

DEPOSITION APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND DEPOSITION METHOD

Electrostatic chuck with charge dissipation coating

Electrostatic chuck having an annular outer region covered by an insulating film

Work holder and work machining method

BASIC BODY OF MAGNETIC CLAMPING PLATE AND METHOD OF PRODUCTION THEREOF

MULTI-ROW MAGNETIC DIAL FOR THE CONVEYANCE OF WORKPIECES AND RELATED METHOD

MAGNETIC SUBSTANCE HOLDING DEVICE MINIMALIZING RESIDUAL MAGNETISM

Electrostatic chuck and method of manufacturing electrostatic chuck

Rotary jig of battery cell and process of welding for battery cell using the same

High conductivity electrostatic chuck

Apparatus and method utilizing a magnetic force to apply a force to a material

High surface resistivity electrostatic chuck

High precision chuck with centering function

PERMANENT ELECTROMAGNETIC INDEXING APPARATUS

LOCKING MECHANISM OF A WORKTABLE OF A DRILLING MACHINE

METHOD OF HOLDING EASILY DEFORMED WORKPIECES AND CHUCK FOR CARRYING OUT THE METHOD

Method and a device for effecting automatic centering of an annular workpiece on a rotating surface

Centering process in chucking work and apparatus therefor

Modular permanent magnet chuck

Turning system and method of use