44827 ⎘
Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by liquid or gas pressure only
POLISHING APPARATUS INCLUDING MOVABLE DAMPER
#2MEMBRANE FOR APPLYING PRESSURE TO PAD IN CHEMICAL MECHANICAL POLISHING
#3SURFACE TREATMENT APPARATUS WITH SELECTIVE LOADING
#4Pressure shoe with expansion chamber
#5Grinding apparatus
#6Dressing apparatus and substrate holding apparatus
#7Polishing apparatus